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In-situ Characterization of Laser Deposited Fe/Ag Multilayers by a Combination of Time-of-Flight, Rheed and Resistance Measurements

Published online by Cambridge University Press:  10 February 2011

Sebastian Fähler ,
Martin Weisheit  and
Hans-Ulrich Krebs
Sebastian Fähler
Affiliation:
Institut fü Metallphysik, Universität Goettingen, Hospitalstrasse 3–7, 37073 Göttingen and Sonderforschungsbereich 345, Germany, [email protected]
Martin Weisheit
Affiliation:
Institut fü Metallphysik, Universität Goettingen, Hospitalstrasse 3–7, 37073 Göttingen and Sonderforschungsbereich 345, Germany, [email protected]
Hans-Ulrich Krebs
Affiliation:
Institut fü Metallphysik, Universität Goettingen, Hospitalstrasse 3–7, 37073 Göttingen and Sonderforschungsbereich 345, Germany, [email protected]
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Abstract

Fe/Ag multilayers, prepared by pulsed laser deposition (PLD) using KrF radiation, were characterized in-situ by RHEED (diffraction of high energetic electrons) and resistance measurements during deposition, and by X-ray diffraction after deposition. While the x-ray diffraction experiments give indications for sharp interfaces, the in-situ investigations clearly show an asymmetry of the structural behaviors at the interfaces and mixing effects on a nm scale, especially as soon as Fe is deposited on Ag. Time-of-flight (TOF) measurements performed with a Faraday cup show that during PLD in ultrahigh vacuum ions are deposited with kinetic energies of more than 100 eV. The results are modeled and discussed with respect to implantation and mixing effects due to the high kinetic energy of the deposited particles during PLD.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 502: Symposium II – In Situ Process Diagnostics & Intelligent Materials Processing , 1997 , 139
Copyright
Copyright © Materials Research Society 1998

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References

LITERATURE

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