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Inorganic-Organic Hybrid Polymers as Photo-Patternable Dielectrics for Multilayer Microwave Circuits

Published online by Cambridge University Press:  01 February 2011

L. Fröhlich ,
R. Houbertz ,
S. Jacob ,
M. Popall ,
R. Mueller-Fiedler ,
J. Graf ,
M. Munk  and
H. von Zychlinski
L. Fröhlich
Affiliation:
Fraunhofer-Institut für Silicatforschung Würzburg, Neunerplatz 2, D-97082 Würzburg, Germany
R. Houbertz
Affiliation:
Fraunhofer-Institut für Silicatforschung Würzburg, Neunerplatz 2, D-97082 Würzburg, Germany
S. Jacob
Affiliation:
Fraunhofer-Institut für Silicatforschung Würzburg, Neunerplatz 2, D-97082 Würzburg, Germany
M. Popall
Affiliation:
Fraunhofer-Institut für Silicatforschung Würzburg, Neunerplatz 2, D-97082 Würzburg, Germany
R. Mueller-Fiedler
Affiliation:
Robert Bosch GmbH, Robert-Bosch-Platz 1, D-70839 Gerlingen-Schillerhöhe, Germany
J. Graf
Affiliation:
Robert Bosch GmbH, Robert-Bosch-Platz 1, D-70839 Gerlingen-Schillerhöhe, Germany
M. Munk
Affiliation:
Marconi Communications GmbH, Gerberstrasse 33, D-71522 Backnang, Germany
H. von Zychlinski
Affiliation:
UnaveraChemLab, Am Ländbach 20, D-82481 Mittenwald, Germany
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Abstract

Inorganic-organic hybrid polymers (ORMOCE®s) combine very good optical and dielectricproperties in the frequency range up to 1 MHz (εr = 3.1 and tanδ = 0.004, both at 1 MHz). Thisis particularly promising for electro-optical (e/o) applications. Multi-layer microwave circuits forhigh frequency applications up to 100 GHz demand extraordinary material properties such as alow permittivity εr < 3 and a dielectric loss tanδ of about 10-3. For low-cost processing, direct UVpatterning would be particularly advantageous. Additionally, the material should be thermallystable at least up to temperatures around 300°C.

We have developed a series of novel ORMOCE® materials for high frequency applications.Using these ORMOCE®s, thick film coatings (up to 150 m) can be produced and directlypatterned by UV lithography with sufficiently high resolution. The synthesis has been carried outusing styrene-substituted organosilanes and silanediols as precursors reacted by simplified solgel-processing in combination with organic cross-linking of polymerizable organic functions.The materials have been characterized at high frequencies up to 40 GHz, exhibiting verypromising dielectric properties of εr = 2.5 and tanδ = 0.0035.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 726: Symposium Q – Hybrid Organic-Inorganic Materials , 2002 , Q11.4
Copyright
Copyright © Materials Research Society 2002

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References

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