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Influence of Strontium Concentration on the Microstructure and Electrical Properties of Sol-Gel Derived Barium Strontium Titanate Thin Films

Published online by Cambridge University Press:  10 February 2011

M.C. Gust ,
L.A. Momoda  and
M.L. Mecartney
M.C. Gust
Affiliation:
Department of Chemical Engineering, University of California, Irvine, CA 92717
L.A. Momoda
Affiliation:
Hughes Research Laboratories, 3011 Malibu Canyon Rd., Malibu, CA 90265
M.L. Mecartney
Affiliation:
Department of Chemical Engineering, University of California, Irvine, CA 92717
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Abstract

BaxSrl−xTiO3 thin films with varying Sr concentration were prepared on Pt coated Si substrates using methoxypropoxide based alkoxide precursors. Films were crystallized by heat treating at 700°C for 30 minutes in an oxygen atmosphere after deposition of each layer. Film thickness ranged from 230 to 260 nm. No evidence of tetragonality was observed in any of the compositions. Films with higher Sr concentrations had a larger average grain size, larger grain size distribution, and increased (111) orientation on (111) oriented Pt. The highest dielectric constant of ˜400 was found for Ba 0.5Sr0.5TiO3, although no direct correlation could be made between the composition and dielectric properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 27
Copyright
Copyright © Materials Research Society 1996

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