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The Influence of Ion Implantation on The Near-Surface Mechanical Properties of Ceramics

Published online by Cambridge University Press:  16 February 2011

C. J. McHargue ,
M. E. O'Hern  and
D. L. Joslin
C. J. McHargue
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
M. E. O'Hern
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
D. L. Joslin
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
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Abstract

Ion implantation of ceramics such as Al2O3 and SiC may produce a highly damaged but crystalline surface layer or an amorphous surface. The specific structure depends upon the implantation parameters. Studies using microindentation techniques show that a crystalline implanted surface has a higher hardness (by 10 to 50%) than the corresponding unimplanted crystal but the elastic modulus is essentially unchanged. The hardness and elastic modulus of amorphous implanted surfaces are less than those of the crystalline material. Estimates of the residual stress have been obtained from microindentation tests.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 111
Copyright
Copyright © Materials Research Society 1990

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References

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