Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-29T07:48:02.075Z Has data issue: false hasContentIssue false
  • English
  • Français

Incoherent Imaging by Z-Contrast Stem: Towards 1Å Resolution

Published online by Cambridge University Press:  21 February 2011

S. J. Pennycook ,
D. E. Jesson  and
A. J. Mcgibbon
S. J. Pennycook
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6030
D. E. Jesson
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6030
A. J. Mcgibbon
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6030
Get access

Abstract

By averaging phase correlations between scattered electrons a high angle detector in the scanning transmission electron microscope (STEM) can provide an incoherent, Z-contrast image at atomic resolution. Phase coherence is effectively destroyed through a combination of detector geometry (transverse incoherence) and phonon scattering (longitudinal incoherence). Besides having a higher intrinsic resolution, incoherent imaging offers the possibility of robust reconstruction to higher resolutions, provided that some lower frequency information is present in the image. This should have value for complex materials and regions of complex atomic arrangements such as grain boundaries. Direct resolution of the GaAs sublattice with a 300kV is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 607
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Scherzer, O., J. Appl. Phys. 20 20 (1949).CrossRefGoogle Scholar
2. Crewe, A. V., Wall, J. and Langmore, J., Science 168, 1338 (1970).CrossRefGoogle Scholar
3. Engel, A., Wiggins, J. W., and Woodruff, D. C., J. Appl. Phys. 45, 2739 (1974).CrossRefGoogle Scholar
4. Crewe, A. V., Langmore, J. P., and Isaacson, M. S., in Physical Aspects of Electron Microscopy and Microbeam Analysis, edited by Siegel, B. M. and Beaman, D. R. (Wiley and Sons, New York, 1975), p. 47.Google Scholar
5. Wall, J., Langmore, J., Isaacson, M., and Crewe, A. V., Proc. Nat. Acad. Sci. 71, 1 (1974)CrossRefGoogle Scholar
6. Isaacson, M. S., Ohtsuki, M., and Utlaut, M., in Introduction to Analytical Electron Microscopy, edited by Hren, J. J., Goldstein, J. I., and Joy, D. C., (Plenum Press, New York, 1979), p. 343.CrossRefGoogle Scholar
7. Cowley, J. M., Ultramicroscopy 2, 3 (1976).CrossRefGoogle Scholar
8. Ade, G., Optik 49, 113 (1977).Google Scholar
9. Jesson, D. E. and Pennycook, S. J., Proc. R. Soc. Lond. A441, 261 (1993).Google Scholar
10. Spence, J. C. H., Zuo, J. M., and Lynch, J., Ultramicroscopy 32, 233 (1989).CrossRefGoogle Scholar
11. Loane, R. F., Xu, P., and Silcox, J., Acta. Cryst. A47, 267 (1991).CrossRefGoogle Scholar
12. Pennycook, S. J. and Jesson, D. E., Ultramicroscopy 37, 14 (1991).CrossRefGoogle Scholar
13. Jesson, D. E. and Pennycook, S. J., Proc. R. Soc. Lond. submitted (1993).Google Scholar
14. Hall, C. R. and Hirsch, P. B., Proc. Roc. Soc. A 286, 158–177 (1965).Google Scholar
15. Bird, D. M. and Q King, A., Acta Cryst. A46, 202 (1990).CrossRefGoogle Scholar
16. Allen, L. J. and Rossouw, C. J., Phys. Rev. B42, 11644 (1990)CrossRefGoogle Scholar
17. Treacy, M. M. J. and Gibson, J. M., these proceedings.Google Scholar
18. Warren, B. E., X-Ray Diffraction, (Dover Publishing, New York, 1990).Google Scholar
19. Fertig, J. and Rose, H., Optik 59, 407 (1981).Google Scholar
20. Loane, R. F., Kirkland, E. J., and Silcox, J., Acta. Cryst. A44, 912 (1988).CrossRefGoogle Scholar
21. Pennycook, S. J. and Jesson, D. E., Acta Metall. Mater. 40, Suppl. S149 (1992).CrossRefGoogle Scholar
22. Cowley, J. M., and Huang, Y., Ultramicroscopy 40, 171 (1992).CrossRefGoogle Scholar
23. Perovic, D. D., Howie, A. and Rossouw, C. J., Phil. Mag. Letts. 67, 261 (1993)CrossRefGoogle Scholar
24. Gull, S. F., and Skilling, J., IEE Proc. 131F 646 (1984).Google Scholar
25. Pennycook, S. J., Jesson, D. E., Chisholm, M. F., Ferridge, A. G. and Seddon, M. J., Proc. 10th Pfefferkom Conf. on Signal and Image Processing, Cambridge, U. K. (Scanning Microscopy International, AMF O'Hare, in press).Google Scholar
26. Xu, P., Kirkland, E. J., Silcox, J., and Keyse, R., Ultramicroscopy 32, 93 (1990).CrossRefGoogle Scholar
27. McGibbon, A. J., Pennycook, S. J. and Wasilewski, Z. in Growth Processing and Characterization of Semiconductor Heterostructures, edited by Gumbs, G., Luryi, S., Weiss, B., and Wicks, G. W. (Mater. Res. Soc. Proc. 326, Pittsburg, PA, 1994, in press)Google Scholar
28. Browning, N. D., and Pennycook, S. J., Microbeam Analysis 2, 81 (1993).Google Scholar
29. Browning, N. D., Chisholm, M. F., and Pennycook, S. J., Nature 366, 143 (1993).CrossRefGoogle Scholar