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In Vivo Biostability of CVD Silicon Oxide and Silicon Nitride Films

Published online by Cambridge University Press:  01 February 2011

John M. Maloney ,
Sara A. Lipka  and
Samuel P. Baldwin
John M. Maloney
Affiliation:
MicroCHIPS, Inc. 6B Preston Court Bedford, MA 01730
Sara A. Lipka
Affiliation:
MicroCHIPS, Inc. 6B Preston Court Bedford, MA 01730
Samuel P. Baldwin
Affiliation:
MicroCHIPS, Inc. 6B Preston Court Bedford, MA 01730
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Abstract

Low pressure chemical vapor deposition (LPCVD) and plasma enhanced chemical vapor deposition (PECVD) silicon oxide and silicon nitride films were implanted subcutaneously in a rat model to study in vivo behavior of the films. Silicon chips coated with the films of interest were implanted for up to one year, and film thickness was evaluated by spectrophotometry and sectioning. Dissolution rates were estimated to be 0.33 nm/day for LPCVD silicon nitride, 2.0 nm/day for PECVD silicon nitride, and 3.5 nm/day for PECVD silicon oxide. A similar PECVD silicon oxide dissolution rate was observed on a silicon oxide / silicon nitride / silicon oxide stack that was sectioned by focused ion beam etching. These results provide a biostability reference for designing implantable microfabricated devices that feature exposed ceramic films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J14.3
Copyright
Copyright © Materials Research Society 2005

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References

[1] Santini, J. T. Jr , Cima, M. J., and Langer, R., “A controlled release microchip,” Nature, 397, 335–338 (1999).Google Scholar
[2] Hämmerle, H., Kobuch, K., Kohler, K., Nisch, W., Sachs, H., and Stelzle, M., “Biostability of micro-photodiode arrays for subretinal implantation,” Biomaterials, 23, 797–804 (2002).Google Scholar
[3] Li, Y., Shawgo, R. S., Tyler, B., Henderson, P. T., Vogel, J. S., Rosenberg, A., Storm, P. B., Langer, R., Brem, H., and Cima, M. J., “In vivo release from a drug delivery MEMS device,” J. Controlled Rel., 100, 211–219 (2004).Google Scholar
[4] Edell, D. J., “A peripheral nerve information transducer for amputees: long-term multichannel recordings from rabbit peripheral nerves,” IEEE Trans. Biomed. Eng., BME-33, 203–214 (1986).Google Scholar
[5] Hetke, J. F., Lund, J. L., Najafi, K., Wise, K. D., and Anderson, D. J., “Silicon ribbon cables for chronically implantable microelectrode arrays,” IEEE Trans. Electron Devices, 41, 314–321 (1994).Google Scholar
[6] Osenbach, J. W. and Knolle, W. R., “Behavior of a-SiN-H and a-SiON:H films in condensed water,” J. Electrochem. Soc., 139, 3346–3351 (1992).Google Scholar
[7] Vogt, M. and Hauptmann, R., “Plasma-deposited passivation layers for moisture and water protection,” Surface Coatings Tech., 74-75, 676–681 (1995).Google Scholar
[8] Schmitt, G., Schultze, J.-W., Fassbender, F., Buss, G., Lüth, H., and Schöning, M. J., “Passivation and corrosion of microelectrode arrays,” Electrochimica Acta, 44, 3865–3883 (1999).Google Scholar
[9] Cogan, S. F., Edell, D. J., Guzelian, A. A., Liu, Y. P., and Edell, R., “Plasma-enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating,” J. Biomed. Mat. Res., 67, 856–867 (2003).Google Scholar
[10] Anderson, J. M., “Inflammation, wound healing, and the foreign body response,” in Biomaterials Science, edited by Ratner, B. D. et al, (Academic Press, 1996), pp. 165–173.Google Scholar