This is a copy of the slides presented at the meeting but not formally written up for the volume.

We describe high-throughput experimentation of epitaxial oxide film growth by means of in situ monitoring. Ion beam assisted deposition is used to create a biaxially aligned crystalline template for epitaxial film growth on a flexible metal tape. Metal tape is fed continuously in a reel-to-reel transport system inside the vacuum deposition chamber. Long length of tape is used for sequential combinatorial experiments of epitaxial growth. We utilize in situ reflection high energy electron diffraction (RHEED) for high-throughput analysis of samples. We describe the techniques and the methodology that we developed for this experimental system. This work is supported by the Department of Energy Office of Electricity Delivery & Energy Reliability.