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In situ electrical resistance measurements of Al-Ge films in the TEM using a modified heating holder

Published online by Cambridge University Press:  14 March 2011

M.A. Verheijen ,
J.J.T.M. Donkers ,
J.F.P. Thomassen ,
J.J. van den Broek ,
R.A.F. van der Rijt ,
M.J.J. Dona  and
C.M. Smit
M.A. Verheijen
Affiliation:
Philips CFT, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
J.J.T.M. Donkers
Affiliation:
Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
J.F.P. Thomassen
Affiliation:
Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
J.J. van den Broek
Affiliation:
Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
R.A.F. van der Rijt
Affiliation:
Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
M.J.J. Dona
Affiliation:
Philips CFT, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
C.M. Smit
Affiliation:
Philips CFT, Prof. Holstlaan 4, 5656 AA Eindhoven, the Netherlands
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Abstract

A TEM specimen holder has been developed for the measurement of the electrical resistance of a TEM sample as a function of temperature. A Philips TEM heating holder was modified for this purpose. This creates the opportunity to directly correlate changes in the resistance to microstructural changes as a function of temperature.

The microstructure of Al-Ge films of several thicknesses has been studied in an in-situ annealing experiment and has been recorded on videotape, while simultaneously acquiring resistance data. These in-situ TEM studies confirm that the irreversible decrease in resistance of these films is caused by crystallisation. During this transition segregation occurs, resulting in crystalline Al and Ge phases.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 615: Symposium G – Polycrystalline Metal & Magnetic Thin Films - 2000 , 2000 , G6.1.1
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1. Verheijen, M.A. et al. , Review of scientific instruments, submitted.Google Scholar
2. Jacobs, J.W.M. and Verhoeven, J.F.C.M., Journal of Microscopy, 143, Pt 1 (1986) 103.10.1111/j.1365-2818.1986.tb02768.xGoogle Scholar
3. Catalina, F., Afonso, C.N. and Ortiz, C., Thin Solid Films, 167 (1988) 57.10.1016/0040-6090(88)90481-6Google Scholar
4. A selection of these films can be downloaded at http://www.philips.research.comGoogle Scholar