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Improvement in Tribomechanical Properties of Commercial TiN Coatings by Argon Ion Implantation

Published online by Cambridge University Press:  25 February 2011

L. J. Liu ,
W. C. Zhou ,
D. K. Sood  and
R. Manory
L. J. Liu
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
W. C. Zhou
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
D. K. Sood
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
R. Manory
Affiliation:
Department of Chemical & Metallurgical Engineering, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
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Abstract

About 2 μm thick commercial coatings of TiN on high speed steel substrates were implanted at RT with Ar ions of 95 keV energy to doses between 0.1–1.0×1017 ions/cm2. An ultramicrohardness machine was used to measure hardness, and a (sapphire) ball-on-disk machine to measure wear, friction and adhesion. Hardness enhancements up to about 50% were observed as dose increased. However, at the highest dose, hardness reduced by nearly 2 times the unimplanted value. Friction coefficient and relative wear are correlated and reduce with ion dose. Films undergo brittle fracture during sliding tests. These results are found to be very sensitive to small changes in relative humidity. All implants lead to improved wear and adhesion as compared to an unimplanted surface. These results are discussed in terms of ion damage, accumulation of Ar gas bubbles and a possible break-up of the TiN phase during ion bombardment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 469
Copyright
Copyright © Materials Research Society 1993

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