Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-25T15:30:49.938Z Has data issue: false hasContentIssue false

The Impact of Domains on the Dielectric and Electromechanical Properties of Ferroelectric Thin Films

Published online by Cambridge University Press:  10 February 2011

S. Trolier-McKinstry
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
P. Aungkavattana
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
F. Chu
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
J. Lacey
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
J-P. Maria
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
J. F. Shepard Jr
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
T. Su
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
F. Xu
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA
Get access

Abstract

In ferroelectric thin films for capacitive and piezoelectric applications, it is important to understand which mechanisms contribute to the observed dielectric constant and piezoelectricity. In soft PZT (PbZr1−xTixO3) ceramics, over half the room temperature response is associated with domain wall contributions to the properties. However, recent studies on bulk ceramics have demonstrated that the number of domain variants within grains, and the mobility of the twin walls depend on the grain size. This leads to a degradation in the dielectric and piezoelectric properties for grain sizes below a micron. This has significant consequences for thin films since a lateral grain size of 1 μm is often the upper limit on the observed grain size. In addition, since the pertinent domain walls are ferroelastic, the stress imposed on the film by the substrate could also clamp the piezoelectric response. To investigate these factors, controlled stress levels were imposed on PZT films of different thickness while the dielectric and electromechanical properties were measured. It was found that for undoped sol-gel PZT 40/60, 52/48, and 60/40 thin films under a micron in thickness, the extrinsic contributions to the dielectric and electromechanical properties make very modest contributions to the film response. No significant enhancement in the properties was observed even when the film was brought through the zero global stress condition. Comparable results were obtained from laser ablated films grown from hard and soft PZT targets. Finally, little twin wall mobility was observed in AFM experiments. The consequences of this in terms of the achievable properties in PZT films will be presented. Work on circumventing these limitations via utilization of antiferroelectric phase switching films and relaxor ferroelectric single crystal films will also be discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Luginbuhl, Ph., Racine, G. - A., Lerch, Ph., Romanowicz, B., Brooks, K. G., de Rooij, N. F., Renaud, Ph., and Setter, N., Sensors and Actuators A54, 530 (1996).Google Scholar
2. Muralt, P., Kohli, M., Maeder, T., Kholkin, A., Brooks, K., Setter, N., and Luthier, R., Sensors and Actuators A48, 157 (1995).Google Scholar
3. Chen, H. D., Udayakumar, K. R., Gaskey, C. J., and Cross, L. E., Appl. Phys. Lett. 67, 3411 (1995).Google Scholar
4. Al-Shareef, H. and Dimos, D., Proc. 10th Int. Symp. Appl. Ferroelectrics. 421 (1996).Google Scholar
5. Polla, D. and Francis, L. F., MRS Bull. 21(7), 59(1996).Google Scholar
6. Zhang, X. L., Chen, Z. X., Cross, L. E., and Schulze, W. A., J. Mat. Sci. 18, 968 (1983).Google Scholar
7. Zhang, Q. M., Wang, H., Kim, N., and Cross, L. E., J. Appl. Phys. 75, 454 (1994).Google Scholar
8. Damjanovich, D., Demartin, M., Chu, F., and Setter, N., Proc.10th Int. Symp. Appl. Ferro. (1996).Google Scholar
9. Haun, M. J., Thermodynamic Theory of the Lead Zirconate - Lead Titanate Solid Solution System. Ph. D. Thesis, The Pennsylvania State University (1988).Google Scholar
10. Kim, N., Grain Size Effect on the Dielectric and Piezoelectric Properties in Compositions Which are Near the Morphotropic Phase Boundary of Lead Zirconate - Lead Titanate Based Ceramics. Ph. D. Thesis, The Pennsylvania State University, (1994).Google Scholar
11. Cao, W. and Randall, C., J. Phys. Chem. Sol. 57, 1499 (1996).Google Scholar
12. Demczyk, B. G., Rai, R. S., and Thomas, G., J. Am. Ceram. Soc. 73, 615 (1990).Google Scholar
13. Arlt, G. and Pertsev, N. A., J. Appl. Phys. 70, 2283 (1991).Google Scholar
14. Hendrickson, M., Su, T., Trolier-McKinstry, S., Rod, B. J., and Zeto, R. J., Proc. 10th Int. Symp. Appl. Ferro. 683 (1996).Google Scholar
15. Tani, T., Lakeman, C. D. E., Li, J. F., Xu, A., and Payne, D. A., Ceram. Trans. 43, 89 (1994).Google Scholar
16. Shepard, J. F. Jr, Trolier-McKinstry, S., Hendrickson, M., and Zeto, R., MRS Proc. 459: Materials for Smart Systems II 47 (1997).Google Scholar
17. Brantley, W., J. Appl. Phys. 44, 534 (1973).Google Scholar
18. Tuchiya, T., Itoh, T., Sasaki, G.., and Suga, T., J. Ceram. Soc. Jpn. 104, 159 (1996).Google Scholar
19. Brown, R. F., Can. J. Phys. 39, 741 (1961).Google Scholar
20. Shepard, J. F. Jr, Trolier-McKinstry, S., Hendrickson, M. A., and Zeto, R., Proc. 10th int. Symp. Appl. Ferro. 161 (1996).Google Scholar
21. Tuttle, B. A., Garino, T.J., Voight, J. A., Headley, T. J., Dimos, D., and Eatough, M. O., in Science and Technology of Electroceramic Thin Films. Auciello, O. and Waser, R. (eds) (Kluwer Academic Publishers, The Netherlands 1995), pp. 117 - 132.Google Scholar
22. Piezokinetics, Inc.Google Scholar
23. Lacey, J. L. and Trolier-McKinstry, S., MRS Proc. 459: Materials for Smart Systems II 207 (1997).Google Scholar
24. Zavala, G., Fendler, J. H., and Trolier-McKinstry, S., J. Appl. Phys. 81(11) 74807491 (1997).Google Scholar
25. Meeks, S. W. and Timme, R. W., J. Appl. Phys. 46, 4334 (1975).Google Scholar
26. Zhang, Q. M., Zhao, J., Uchino, K., and Zheng, J., J. Mat. Res. 12 226 (1997).Google Scholar
27. Theis, C. D. and Schlom, D. G. MRS Proc. 401. 171 (1996).Google Scholar
28. Foster, C. et al., MRS Proc. 401, 139 (1996).Google Scholar
29. Gaskey, C. J., Udayakumar, K. R., Chen, H. D., and Cross, L. E., J. Mater. Res. 10, 2764 (1995).Google Scholar
30. Yamakawa, K., Trolier-McKinstry, S., and Dougherty, J. P., Proc. 10th Int. Symp. Appl. Ferro. 405 (1996).Google Scholar
31. Cross, L.E., Pennsylvania State University, private communication (1997).Google Scholar
32. Park, S. E. and Shrout, T. R., presentation at the 1997 Williamsburg Workshop on Ferroelectricity, Feb. 1997.Google Scholar
33. Kugel, V., Pennsylvania State University, private communication (1997).Google Scholar