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Hydrogen Incorporation in MPCVD Nanocrystalline Diamond Films During the Deposition Process

Published online by Cambridge University Press:  31 January 2011

Dominique Ballutaud ,
Marie-Amandine Pinault ,
François Jomard ,
Alain Lusson  and
Samuel Saada
Dominique Ballutaud
Affiliation:
[email protected]
Marie-Amandine Pinault
Affiliation:
[email protected], CNRS, GEMaC, Meudon, France
François Jomard
Affiliation:
[email protected], CNRS, GEMaC, Meudon, France
Alain Lusson
Affiliation:
[email protected], CNRS, GEMaC, Meudon, France
Samuel Saada
Affiliation:
[email protected], CEA, LIST, Gif-sur-Yvette, France
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Abstract

Hydrogen incorporation is studied in two Microwave Plasma CVD nanocrystalline diamond films deposited with prolongated BIAS or not during the growth step. The hydrogen content and bonding forms are analysed by Secondary Ion Mass Spectrometry, Raman and Fourier Transformer Infrared Spectroscopy. Our results show a high hydrogen concentration up to 3.1021 cm-1, as expected in nanocrystalline diamond, and in good agreement with the sp2 phase rate measured by Raman spectroscopy . The FTIR spectra exhibit two sharp peaks at 2850 and 2920 cm-1 and show that a fraction of hydrogen is bonded to sp3 CH2 groups. Hydrogen desorption experiments are performed to analyse the local structure modification of the diamond films.

Keywords

diamondnanostructureplasma-enhanced CVD (PECVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1203: Symposium J – Diamond Electronics and Bioelectronics-Fundamentals to Applications III , 2009 , 1203-J17-33
Copyright
Copyright © Materials Research Society 2010

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