Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-25T03:24:40.097Z Has data issue: false hasContentIssue false
  • English
  • Français

Hybrid Polymer/Ultrathin Porous Nanocrystalline Silicon Membranes System for Flow-through Chemical Vapor and Gas Detection

Published online by Cambridge University Press:  31 January 2011

Maryna Kavalenka ,
David Fang ,
Christopher C Striemer ,
James L McGrath  and
Philippe M Fauchet
Maryna Kavalenka
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
David Fang
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
Christopher C Striemer
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
James L McGrath
Affiliation:
[email protected], University of Rochester, Biomedical Engineering, Rochester, New York, United States
Philippe M Fauchet
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
Get access

Abstract

Here we discuss a novel capacitive-type chemical sensor structure that uses recently discovered porous nanocrystalline silicon (pnc-Si) membranes [1] covered with metal as the capacitor plates while a polymer layer sandwiched between them serves as the sensing layer for solvent vapor detection. Pnc-Si is new ultrathin (15 nm) membrane material with pore sizes ranging from 5 to 50 nm and porosities from < 0.1 to 15 % that is fabricated using standard silicon semiconductor processing techniques. We present a study of pnc-Si membranes as a platform for such a sensor. The degree of swelling and the reversibility of the polymer/pnc-Si membrane system immersed in analyte-containing vapors are observed using optical and electrical techniques.

Keywords

sensornanostructureelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1190: Symposium NN – Active Polymers , 2009 , 1190-NN12-03
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Striemer, C. C., Gaborski, T. R., McGrath, J. L. & Fauchet, P. M. Nature 445, 749–753 (2007)10.1038/nature05532Google Scholar
2 Li, J.R., Xu, J.R., Zhang, M.Z. et al. Carbon 41, 2353(2003)10.1016/S0008-6223(03)00273-2Google Scholar
3 Patel, S. V., Mlsna, T. E. et al. Sens. Actuators B 96, 541–553 (2003)10.1016/S0925-4005(03)00637-3Google Scholar
4 Kitsara, M., Goustouridis, S. et al. Sens. Actuators B 127, 186–192 (2007)10.1016/j.snb.2007.07.021Google Scholar
5 Kummer, A.M., Hierlemann, A., Baltes, H. Analytical Chemistry 76, 2470–2477 (2004)10.1021/ac0352272Google Scholar
6 Hierlemann, A. et al. Sens. Actuators B 70, 2(2000)10.1016/S0925-4005(00)00546-3Google Scholar
7 McGill, R. A. et al. Sens. Actuators B 65, 10(2000)10.1016/S0925-4005(99)00352-4Google Scholar
8 Grate, J. W., Wise, B. M., Abraham, M. H. Analytical Chemistry 71, 4544(1999)10.1021/ac990336vGoogle Scholar
9 Patel, S.V. et al. Int. J. of P. and An. Chem. 76, 872–877 (2008)Google Scholar
10 Lee, J.N., Park, C., Whitesides, G. M. Analytical Chemistry 75, 6544–6554 (2003)10.1021/ac0346712Google Scholar