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High Resolution XRD Studies of Ion Beam Irradiated InGaAs/InP Multi Quantum Wells

Published online by Cambridge University Press:  01 February 2011

S. Dhamodaran ,
N Sathish ,
Anand P Pathak ,
Andrzej Turos ,
Devesh K Avasthi  and
Brij M Arora
S. Dhamodaran
Affiliation:
[email protected], University of Hyderabad, School of Physics, Centr al University (P.O), Hyderabad, 500 046, India
N Sathish
Affiliation:
[email protected], University of Hyderabad, School of Physics, Central University (P.O), Hyderabad, 500 046, India
Anand P Pathak
Affiliation:
[email protected], University of Hyderabad, School of Physics, Central University (P.O), Hyderabad, 500 046, India, +91-40-23010181 / 23134316, +91-40-23010181 / 23010227
Andrzej Turos
Affiliation:
[email protected], Institute of Electronic Materials Technology, Warsaw, 01-919, Poland
Devesh K Avasthi
Affiliation:
[email protected], Inter University Accelerator Centre, New Delhi, 110 057, India
Brij M Arora
Affiliation:
[email protected], Tata Institutte of Fundamental Research, Mumbai, 400 005, India
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Abstract

Multi quantum wells of InGaAs/InP grown by metal organic chemical vapor deposition have been irradiated using swift heavy ions. Irradiation has been performed using 150MeV Ag and 200MeV Au ions. Both as-grown and irradiated samples were subjected to rapid thermal annealing at 500 and 7000C for 60s. As-grown, irradiated and annealed samples were subjected to high resolution x-ray diffraction studies. Both symmetric and asymmetric scans were analyzed. The as-grown and Ag ion irradiated samples show sharp and highly ordered satellite peaks whereas, the Au ion irradiated samples show broad and low intense peaks. The higher order satellite peaks of the annealed samples vanished with increase of annealing temperature from 500 to 7000C, indicating mixing induced interfacial disorder. Annealing of irradiated samples show higher mixing and disorder and no higher order satellite peaks were observed. Negligible strain was observed after high temperature annealing of as grown samples. Strain values calculated from the X-ray studies indicate that the irradiated samples have higher strain which has been reduced upon annealing. This indicates that the annealing induced mixing occurs maintaining the lattice parameter close to that of the substrate. The effect of electronic energy loss for interface mixing has been discussed in detail. The role of incident ion fluence in combination with the electronic energy loss will also be discussed in detail. The results have been compared with the literature and discussed in detail.

Keywords

chemical vapor deposition (CVD) (deposition)x-ray diffraction (XRD)radiation effects
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG07-24
Copyright
Copyright © Materials Research Society 2007

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