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A High Resolution TEM Specimen Thinning System

Published online by Cambridge University Press:  21 February 2011

R. Clampitt ,
G. G. Ross ,
M. Phelan  and
S. A. Davies
R. Clampitt
Affiliation:
Oxford Applied Research, Crawley Mill, Witney, Oxfordshire, OX8 5TJ, UK
G. G. Ross
Affiliation:
Department of Theoretical Physics, University of Oxford, Keble Road, OX1 3NP, UK
M. Phelan
Affiliation:
Oxford Applied Research, Crawley Mill, Witney, Oxfordshire, OX8 5TJ, UK
S. A. Davies
Affiliation:
Oxford Applied Research, Crawley Mill, Witney, Oxfordshire, OX8 5TJ, UK
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Abstract

Improvements in specimen preparation for TEM analysis are being constantly sought, particularly in the study of microelectronics' materials and in failure analysis of devices. We describe here a compact commercial system capable of thinning (milling) selected regions of a specimen by means of a scanned focused ion beam of sub-micron spatial resolution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 254: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials III , 1991 , 171
Copyright
Copyright © Materials Research Society 1992

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References

1. Clampitt, R., Nucl. Instrum. Meth. 189, 111 (1981)CrossRefGoogle Scholar
2. Watkins, R. E. J., Rockett, P., Thorns, S., Clampitt, R., Syms, R., Vacuum 36 (11/12), 961–967 (1986)CrossRefGoogle Scholar
3. Clampitt, R., Mingay, P. W., Davies, S. T., Sensors & Actuators A 25–27, 15–20 (1991)Google Scholar