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High Resolution Sem Imaging of Multilayer Thin Films

Published online by Cambridge University Press:  15 February 2011

J. R. Kingsley ,
I. D. Ward  and
J. P. Vitarelli
J. R. Kingsley
Affiliation:
Charles Evans & Associates. Redwood City, CA 94063
I. D. Ward
Affiliation:
Charles Evans & Associates. Redwood City, CA 94063
J. P. Vitarelli
Affiliation:
Charles Evans & Associates. Redwood City, CA 94063
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Abstract

The high resolution capability of the JEOL JSM-890 In Lens Field Emission Scanning Electron Microscope (ILFESEM) is used for the routine determination of both film thicknesses and surface morphologies from a single sample. This single sample approach is possible because of the 0.7 nm resolution of the instrument, and the simple sample preparation. In many cases, the desired information can be obtained from a simple cleave of the sample.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 207
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. , Goldstein et al. Scanning Electron Microscopy and Microanalysis. Plenum 1981 Google Scholar
2. JEOL Application Note, No. 1201B 110.Google Scholar