Published online by Cambridge University Press: 15 February 2011
We report in situ high resolution transmission electronmicroscopy studies of NiSi2-Medi-ated crystallization ofAmorphous Si. Compared to conventional solid phase epitaxy of (111) Si, anenhancement of the growth rate by three orders of magnitude was observed andhigh quality twin-free needles of <111> Si were formed.Crystallization occurred via a ledge growth mechanism at the epitaxial TypeA NiSi2/crystalline Si (111) interface. A Model for NiSi2-Mediated crystallization of Amorphous Si involving thepassage of kinks along <110> ledges at theNiSi2/crystalline Si (111) interface is proposed.