Published online by Cambridge University Press: 15 February 2011
Submicrometer gratings have been etched in GaAs and CdS crystals which have been immersed in an oxidizing etch and illuminated with interferring laser beams. A resolution of 170 nm was obtained. At high laser intensity and with prolonged etching time the surface properties of the material are degraded. The use of in-situ optical measurements of grating parameters allows ready optimization of the grating fabrication process.
This work was supported by the Defense Advanced Research Projects Agency and the Air Force Office of Scientific Research.