Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-29T07:42:32.844Z Has data issue: false hasContentIssue false
  • English
  • Français

High Power Laser Effects on Unimplanted and Implanted Aluminium Single Crystals

Published online by Cambridge University Press:  15 February 2011

G. Battaglin ,
A. Carnera ,
G. Della Mea ,
P. Mazzoldi ,
A.K. Jain ,
V.N. Kulkarni  and
D.K. Sood
G. Battaglin
Affiliation:
Unità GNSM-CNR, Institute of Physics, Università di Padova, Italy
A. Carnera
Affiliation:
Unità GNSM-CNR, Institute of Physics, Università di Padova, Italy
G. Della Mea
Affiliation:
Unità GNSM-CNR, Institute of Physics, Università di Padova, Italy
P. Mazzoldi
Affiliation:
Unità GNSM-CNR, Institute of Physics, Università di Padova, Italy
A.K. Jain
Affiliation:
Unità GNSM-CNR, Institute of Physics, Università di Padova, Italy
V.N. Kulkarni
Affiliation:
Nuclear Physics Division, Bhabha Atomic Research Centre, Bombay–4000 85, INDIA
D.K. Sood
Affiliation:
Nuclear Physics Division, Bhabha Atomic Research Centre, Bombay–4000 85, INDIA
Get access

Extract

Mechanisms involved in laser processing of ion implanted semiconductors have been extensively investigated (1,2). Relatively little work has been done on implanted metals (3,10). The liquid solid interface (melt front) velocity in metals (11,12) is much larger than that in Si. Therefore several nonequilibrium effects on recrystallization (6) solute segregation (9) and metastable phase formation (4,6,7) are observed. Such effects would depend on the melt front velocity, equilibrium phase diagram considerations (such as equilibrium segregation coefficient Ko, miscibility in licuid phase, intermediate phases etc.) and also on the as implanted nonequilibrium phase and defect structure. In this paper we present a study of the influence of some of these parameters during laser treatment of sincle crystals of virgin Al and dilute implanted alloys of Mo and Cd in Al.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1: Symposium – Laser and Electron-Beam Solid Interactions in Materials Processing , 1980 , 615
Copyright
Copyright © Materials Research Society 1981

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Laser-Solid Interactions and Laser Processing, 1978, edited by Ferris, S.D., Leamy, H.J. and Poate, J.M. (AIP, New York, 1979).Google Scholar
2. Laser and Electron Beam Processing of Materials, Symposium at Materials Research Society Annual Meeting, 1979, edited by White, C.W. and Peercy, P.S. (Academic, New York, 1980).Google Scholar
3. Mea, G. Della and Mazzoldi, P. in Ref. 1 p. 212.Google Scholar
4. Jain, A.K., Kulkarni, V.N., Sood, D.K., Sundararaman, M. and Yadav, R.D.S., Nucl. Instr. and Meth. 168, 275 (1980).Google Scholar
5. Mea, G. Della, Donà dalle Rose, L.F., Mazzoldi, P. and Miotello, A., Rad. Eff. 46, 133 (1980).Google Scholar
6. Buene, L., Poate, J.M., Jacobson, D.C., Draper, C.W. and Hirvonen, J.K., Appl. Phys. Lett. 37, 385 (1980).Google Scholar
7. Rimini, E. and Baglin, J.E.E., Appl.Phys.Lett. 37, 481 (1980).Google Scholar
8. Mazzoldi, P., Mea, G. Della, Battaglin, G., Miotello, A., Servidori, M., Bacci, D. and Jannitti, E., Phys. Rev. Lett. 44, 88 (1980).CrossRefGoogle Scholar
9. Poate, J.M. in Proc.of Laser and Electron Beam Processing of Materials (Academic Press, New York, 1980).Google Scholar
10. Jain, A.K., Kulkarni, V.N., Sood, D.K. and Uppal, J.S., J. Appl. Phys. (in press).Google Scholar
11. Donà dalle Rose, L.F. and Miotello, A., Rad.Eff. (in press).Google Scholar
12. Jain, A.K., Kulkarni, V.N. and Sood, D.K., Appl. Phys. (submitted Aug. 1980).Google Scholar
13. Sood, D.K. and Dearnaley, G., Inst. Phys. Conf. Ser. No. 28 (London and Bristol, 1976) p. 196.Google Scholar
14. Moffat, W.G., The Handbook of Binary Phase Diagrams, Vol.I (General Electric, New York, 1978).Google Scholar
15. Shunk, F.A., Constitution of Binary Alloys, Second supplement (McGraw Hill, NewYork, 1969) p. 29.Google Scholar
16. Goldsmith, Alexander, Waterman, T.E. and Hirschorn, H.J. (eds.), Handbook of Thermophysical Properties of Solid Materials, Vol. I: Elements (Macmillan Co., New York, 1961) p. 43.Google Scholar
17. Sparks, M. and Loh, E. Jr., J. Opt. Soc. Am. 69, 847 (1979).CrossRefGoogle Scholar
18. Chu, W.K., Mayer, J.W. and Nicolet, M.A., Backscattering Spectrometry (Academic Press, New York, 1978) p. 251.Google Scholar
19. Rosenberger, F., Fundamentals of Crystal Growth I, (Springer-Verlag, Berlin, 1979) p. 419.Google Scholar
20. Battaglin, G., Mea, G. Della, Mazzoldi, P., Jain, A.K., Kulkarni, V.N. and Sood, D.K., 2nd Int.Conf. IBMM Albany, N.Y., abs. H21.Google Scholar