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Harmonic Analysis of AlN Piezoelectric Mesa Structures

Published online by Cambridge University Press:  01 February 2011

Madhulika Mazumdar ,
A. Kabulski ,
R. Farrell ,
Sridhar Kuchibhatla ,
V. R. Pagán  and
D Korakakis
Madhulika Mazumdar
Affiliation:
[email protected], Davis & Elkins College, department of computer science and maths, Elkins, West Virginia, United States
A. Kabulski
Affiliation:
[email protected], West Virginia University, Lane Department of Computer Science and Electrical Engineering, Morgantown, West Virginia, United States
R. Farrell
Affiliation:
[email protected], West Virginia University, Lane Department of Computer Science and Electrical Engineering, Morgantown, West Virginia, United States
Sridhar Kuchibhatla
Affiliation:
[email protected], West Virginia University, Lane Department of Computer Science and Electrical Engineering, Morgantown, West Virginia, United States
V. R. Pagán
Affiliation:
[email protected], West Virginia University, Lane Department of Computer Science and Electrical Engineering, Morgantown, West Virginia, United States
D Korakakis
Affiliation:
[email protected], National Energy Technology Laboratory, Morgantown, West Virginia, United States
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Abstract

In this work we report the displacement response of piezoelectric Aluminum Nitride (AlN) thin film MESA in an electrical circuit consisting of a circular MESA in series with a resistance subjected to time varying electrical loads. ANSYS was utilized for the simulation of 3D piezoelectric structures; using coupled field analysis to understand the electro-mechanical behavior of AlN thin film mesas. ANSYS applies finite element analysis (FEM) method to simulate the transient piezoelectric trends. Ringing and overshoot effects were observed in the thin simulation results on applying pulse voltages of varying frequencies to the circuit. The fast rise time of the voltage pulse could be exciting these effects. The effect of fast rising pulse voltages on the RC time constant of the circuit is still unclear at this point and needs to be further investigated.

Keywords

III-Vmicroelectro-mechanical (MEMS)piezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1129: Symposium V – Materials and Devices for Smart Systems III , 2008 , 1129-V11-08
Copyright
Copyright © Materials Research Society 2009

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References

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