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Hardness depth profiling of ion-implanted polymer thin films

Published online by Cambridge University Press:  01 February 2011

Gunnar Suchaneck ,
Bodo Wolf ,
Margarita Guenther  and
Gerald Gerlach
Gunnar Suchaneck
Affiliation:
Dresden University of Technology, Institute for Solid State Electronics
Bodo Wolf
Affiliation:
Dresden University of Technology, Institute for Crystallography and Solid State Physics D-01062 Dresden, Germany.
Margarita Guenther
Affiliation:
Dresden University of Technology, Institute for Solid State Electronics
Gerald Gerlach
Affiliation:
Dresden University of Technology, Institute for Solid State Electronics
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Abstract

Hardness measurements in ion implanted polymers are complicated by the fact that the hardness of the material varies as a function of depth within the modified layer. This effect is induced by the distribution of deposited energy, which produces a depth-dependent variation in microstructure. We have used the depth-sensing nano-indentation technique to investigate the mechanical properties of thin films of ion-beam modified aromatic polymers deposited onto silicon substrates. The depth of the ion-modified surface layer was determined using the load variation technique from the hardness and elastic module depth profile and the depth dependence of the power law coefficient of the unloading curve.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 725: Symposium P – Organic and Polymeric Materials and Devices-Optical, Electrical, and Optoelectronic Properties , 2002 , P4.12
Copyright
Copyright © Materials Research Society 2002

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References

[1] Gerlach, G. and Sager, K. Sensors and Actuators A43, 181 (1994).Google Scholar
[2] Buchhold, R. Nakladal, A. Gerlach, G. Herold, M. Gauglitz, G. Sahre, K. and Eichhorn, K.-J., Thin Solid Films 350, 178 (1999)Google Scholar
[3] Buchhold, R. Nakladal, A. Gerlach, G. Sahre, K. Eichhorn, K.-J., and Dlubek, G. in Transducers '99, Digest Techn. Papers, Vol. 1, IEEJ, Sendai, 1999, p.230.Google Scholar
[4] Guenther, M. Sahre, K. Suchaneck, G. Gerlach, G. and Eichhorn, K.-J., Surface & Coatings Technology, 142-144, 482 (2001)Google Scholar
[5] Charlesby, A. Radiat. Phys. Chem., 40, 11 (1992)Google Scholar
[6] Dlubek, G. Börner, F., Buchhold, R. Sahre, K. Krause-Rehberg, R. and Eichhorn, K.-J., J. Polymer Sci B38, 3062 (2000)Google Scholar
[7] Guenther, M. Gerlach, G. Suchaneck, G. Sahre, K. Eichhorn, K.-J., Wolf, B. Deineka, A. and Jastrabik, L. Surface & Coatings Technology, (2002) (in print).Google Scholar
[8] Lee, E.H. J. Mat Res. 9, 1043 (1994)Google Scholar
[9] Rao, G. Riester, L. and Lee, E.H. in Beam-Solid Interactions for Materials Synthesis and Processing, edited by Jacobson, D.C. Luzzi, D.E. Heinz, T.F. and Iwaki, M. (Mat. Res. Symp. Proc. 354, Pittsburgh, PA, 1995) pp. 363–368.Google Scholar
[10] Lee, E.G. Rao, G.R. Lewis, M.B. and Mansur, L.K. Nucl. Instrum. Meth. B74, 326 (1993)Google Scholar
[11] Wolf, B. Paufler, P. presented at the 2nd European workshop on nanoindentation, Hueckelhoven, Germany, Oct. 2001 (unpublished).Google Scholar
[12] Ziegler, J. F. Biersack, J. P. and Littmark, U. in The Stopping and Range of Ions in Solids, edited by Ziegler, J. F. (Pergamon Press, New York, 1985) pp. 1–321.Google Scholar
[13] Oliver, W. C. Pharr, G. M. J. Mater. Res. 7, 1564 (1992)Google Scholar
[14] Bhattacharya, A.K. and Nix, W.D. Int. J. Solid Structures 24, 1287 (1988)Google Scholar
[15] Baker, S.P. in Thin Films: Stresses and Mechanical Properties IV, edited by Townsend, P. H., Weihs, T. P. Sanchez, J. E. Jr , and Iwaki, P. Borgesen (Mat. Res. Symp. Proc. 308, Pittsburgh, PA, 1993) pp. 209–216.Google Scholar
[16] Guenther, M. Suchaneck, G. Gerlach, G. Wolf, B. (unpublished)Google Scholar
[17] Bulychev, S.I. Alekhin, V.P. Shorshorov, M.Kh., Ternovskii, A.P. and Shnyrev, G.D. Zavod. Lab. 41, 1137 (1975)Google Scholar
[18] Bulychev, S.I. Alekhin, V.P. Shorshorov, M.Kh. and Ternovskii, A.P. Probl. Prichn. 9, 76 (1976).Google Scholar
[19] Briscoe, B.J. and Sebastian, K.S. Proc. Royal Soc. London A452, 439 (1996)Google Scholar
[20] VanLandingham, M.R. Villarrubia, J.S. Guthrie, W.F. and Meyers, G.F. Macromol. Symp. 167, 15 (2001)Google Scholar