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Growth of ion implanted buried FeSi2 on Si (111) and Si (100)

Published online by Cambridge University Press:  28 February 2011

K. Radermacher ,
S. Mantl ,
Ch. Dieker ,
H. Holzbrecher ,
W. Speier  and
H. Lüth
K. Radermacher
Affiliation:
Institut für Schlcht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jüllich, Germany
S. Mantl
Affiliation:
Institut für Schlcht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jüllich, Germany
Ch. Dieker
Affiliation:
Institut für Schlcht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jüllich, Germany
H. Holzbrecher
Affiliation:
Zentralabteilung für Chemische Analysen, Forschungszentrum Jülich, 5170 Jüllich, Germany
W. Speier
Affiliation:
Zentralabteilung für Chemische Analysen, Forschungszentrum Jülich, 5170 Jüllich, Germany
H. Lüth
Affiliation:
Institut für Schlcht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jüllich, Germany
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Abstract

Buried FeSi2 layers have been fabricated by 200 keV Fe+ implantations into (111) and (100) Si substrates. By varying the dose from 0.4 to 7.1017 Fe+ cm−2 the dependence of the Fe concentration on ion dose was investigated systematically. The samples were characterized by Rutherford backscattering spectrometry, He+ ion channeling and secondary ion mass spectroscopy. In the as-implanted state the Fe peak concentration increases lineary with dose up to ≈2.4.1017 Fe+ cm−2. Above this dose a redistribution of Fe atoms was observed as indicated by comparison of measured depth profiles with Monte-Carlo simulations of high dose implantations. The Fe peak concentration shows an unusual dose dependence after rapid thermal annealing (RTA) at 1150°C for 10 s. A minimum dose of (2.4±0.1)1017 Fe+ cm−2 for (111) Si and a slightly higher dose of (2.7±0.1).1017 Fe+ cm−2 for (100) Si is necessary to form continuous metallic αFeSi2 layers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 235: Symposium A – Phase Formation and Modification by Beam-Solid Interactions , 1991 , 273
Copyright
Copyright © Materials Research Society 1992

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References

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