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Growth of High Al Concentration AlGaN for Solar Blind Photodetector Applications
Published online by Cambridge University Press: 21 March 2011
Abstract
The development of a metalorganic chemical vapor deposition growth process for AlxGa1-xN materials with high aluminum composition (x∼0.40-0.60) on sapphire substrates is reported. Room temperature Hall measurements of Si-doped AlGaN epilayers with x∼0.40 show a narrow window for efficient doping with a carrier concentration of ∼1.5x1018 cm-3 and a mobility of ∼35 cm2/V-s obtained under optimum growth conditions. AlxGa1-xN-based solar-blind p-i-n device structures were grown and diode I-V curves were obtained with a high R0A of <2.9×1010 ohm-cm2. Secondary ion mass spectroscopy measurements show a sharp transition between regions of high concentration of Mg (2×1020 cm-3) and Si (1×1019 cm-3) in p-GaN and n-AlGaN layers, respectively.
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- Copyright © Materials Research Society 2002
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