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Growth of CuO and CuGaO2 Thin Films by Spin-coating Method

Published online by Cambridge University Press:  04 April 2011

Afishah Alias ,
Masato Sakamoto  and
Katsuhiro Uesugi
Afishah Alias
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
Masato Sakamoto
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
Katsuhiro Uesugi
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
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Abstract

CuO and CuGaO2 thin films have been grown on Si (100) substrates using a sol-gel spincoating method. CuO films were successfully fabricated by the annealing around 700°C. At higher temperatures (>800°C), pyramidal CuO islands with 1~2μm in width and 0.4~0.8μm in height were observed. They arranged structures as a straight line parallel to the <110> and <010> directions, which suggests the self-organized growth of CuO pyramidal islands. Delafossite CuGaO2 films were fabricated as well, using Cu-Ga-O mixed solutions with Ga/(Cu+Ga) atomic ratio of 0.5. These results indicate that Cu-based compounds were fabricated by the sol-gel spincoating method.

Keywords

crystal growthoxidesol-gel
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1315: Symposium MM – Transparent Conducting Oxides and Applications , 2011 , mrsf10-1315-mm03-07
Copyright
Copyright © Materials Research Society 2011

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References

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