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Growth and Mechanical and Tribological Characterization of Multi-Layer Hard Carbon Films

Published online by Cambridge University Press:  03 September 2012

J. Ager ,
I. Brown ,
O. Monteiro ,
J. A. Knapp ,
D. M. Follstaedt ,
M. Nastasi ,
K. C. Walter  and
C. J. Maggiore
J. Ager
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
I. Brown
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
O. Monteiro
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
J. A. Knapp
Affiliation:
Sandia National Laboratory, MS 1056, PO Box 5800, Albuquerque, NM 87185
D. M. Follstaedt
Affiliation:
Sandia National Laboratory, MS 1056, PO Box 5800, Albuquerque, NM 87185
M. Nastasi
Affiliation:
Center for Materials Sciences, Los Alamos National Laboratory, Los Alamos, NM 87545
K. C. Walter
Affiliation:
Center for Materials Sciences, Los Alamos National Laboratory, Los Alamos, NM 87545
C. J. Maggiore
Affiliation:
Center for Materials Sciences, Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

Vacuum-arc deposition is used to deposit multilayer carbon films by modulating the sample bias during deposition. The effect of varying the sublayer thickness in multilayer films consisting of alternating layers of “hard” (68.4 GPa, -100 V bias) and “soft” (27.5 GPa, -2000 V bias) was investigated. Films consisting of equal thickness layers of hard and soft material and an individual layer thickness varying from 10 to 35 nm were deposited. Mechanical property measurements were obtained by finite element modeling of nanoindentation load-displacement curves. The film hardness values were about 20% below the average of the component layers and relatively independent of the layer thickness. TEM investigation revealed deterioration of the multilayer structure when the sublayer thickness was below 15 nm due to implantation damage of the hard layers caused by the energetic C+ ions of the soft layers (-2000 V bias) deposited over them. Pin-on-disk wear tests show that the wear rate drops when sublayer thickness is decreased below 20 nm and remains constant with further decreases in the layer thickness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 581
Copyright
Copyright © Materials Research Society 1997

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