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Growth and Characterization of Mg0.15Zn0.85O Thin Films by Pulsed Laser Deposition

Published online by Cambridge University Press:  01 February 2011

Wei Wei ,
Chunming Jin ,
Anand Doraiswamy ,
Roger J Narayan  and
Jagdish Narayan
Wei Wei
Affiliation:
[email protected], North Carolina State University, Materials Science and Engineering, 3030 Engineering Building I, 911 Partners Way, Raleigh, NC, 27695-7907, United States, 919-515-7219
Chunming Jin
Affiliation:
[email protected], North Carolina State University, Materials Science and Engineering, 3030 Engineering Building I, 911 Partners Way, Raleigh, NC, 27695-7907, United States
Anand Doraiswamy
Affiliation:
[email protected], University of North Carolina, Biomedical Engineering, 152 MacNider Hall, Chapel Hill, NC, 27599-7575, United States
Roger J Narayan
Affiliation:
[email protected], University of North Carolina, Biomedical Engineering, 152 MacNider Hall, Chapel Hill, NC, 27599-7575, United States
Jagdish Narayan
Affiliation:
[email protected], North Carolina State University, Materials Science and Engineering, 3030 Engineering Building I, 911 Partners Way, Raleigh, NC, 27695-7907, United States
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Abstract

Mg0.15Zn0.85O thin films were grown on fused silica substrates at different substrate temperatures using pulsed laser deposition. X-ray diffraction and transmission electron microscopy were used to investigate the structure of the films. High resolution transmission electron microscopy showed that the film contained small grains with low angle boundaries. The optical properties of the films were investigated using absorption spectra. The bandgap energy values of the films was determined by fitting the absorption data.

Keywords

thin filmlaser ablationmicroelectronics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 957: Symposium K – Zinc Oxide and Related Materials , 2006 , 0957-K07-38
Copyright
Copyright © Materials Research Society 2007

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References

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