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Grazing incidence small-angle x-ray scattering applied to the characterization of nanocomposite thin films

Published online by Cambridge University Press:  21 March 2011

David Babonneau ,
Amelia Suárez-García ,
José Gonzalo ,
Ivan R. Videnovic ,
Michael G. Garnier ,
Peter Oelhafen ,
Michel Jaouen  and
André Naudon
David Babonneau
Affiliation:
Instituto de Optica, CSIC, Serrano 121, 28006 Madrid, Spain
Amelia Suárez-García
Affiliation:
Instituto de Optica, CSIC, Serrano 121, 28006 Madrid, Spain
José Gonzalo
Affiliation:
Instituto de Optica, CSIC, Serrano 121, 28006 Madrid, Spain
Ivan R. Videnovic
Affiliation:
Institut für Physik, Universität Basel, Klingelbergstrasse 82, 4056 Basel, Switzerland
Michael G. Garnier
Affiliation:
Institut für Physik, Universität Basel, Klingelbergstrasse 82, 4056 Basel, Switzerland
Peter Oelhafen
Affiliation:
Institut für Physik, Universität Basel, Klingelbergstrasse 82, 4056 Basel, Switzerland
Michel Jaouen
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, UFR Sciences, SP2MI, Téléport 2, Bd M. & P. Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France
André Naudon
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, UFR Sciences, SP2MI, Téléport 2, Bd M. & P. Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France
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Abstract

Grazing incidence small-angle x-ray scattering (GISAXS) allows to investigate precisely the microstructure of nanocomposite thin films containing metal nanocrystals produced using different synthesis techniques. We present results on the size, size distribution, shape, and correlation length of metallic nanoparticles embedded in different matrices fabricated by sequential pulsed laser deposition, magnetron sputtering, and ion-beam sputtering co-deposition. The morphology of the nanoparticles is discussed in terms of the different growth process that takes place in each case.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 678: Symposia EE – Applications of Synchrotron Radiation Techniques…IV , 2001 , EE5.6.1
Copyright
Copyright © Materials Research Society 2001

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