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Glancing Angle X-Ray Analysis of Titanium Copper Compound Formations

Published online by Cambridge University Press:  22 February 2011

P. A. Psaras  and
D. Gupta
P. A. Psaras
Affiliation:
IBM Thomas J. Watson Research Center Yorktown Heights, N.Y. 10598
D. Gupta
Affiliation:
IBM Thomas J. Watson Research Center Yorktown Heights, N.Y. 10598
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Abstract

Titanium copper compound formations have been studied via Seeman Bohlin x-ray diffractometry and Rutherford backscattering spectrometry. The heat treatment temperature range was 350°C to 475°C and th heat treatment times ranged from 0 to 240 minutes. Tetragonal gamma TiCu formed first at ˜350°C and was sequentially followed by orthorhombic TiCu3 at ˜400°C. From Rutherford backscattering spectrometry analysis it was concluded that the second TiCu3 compound deviated from ideal stoichiometry to a nonstoichiometric Ti0.88Cu3.12 composition

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 40: Symposium J – Electronic Packaging Materials Science I , 1984 , 145
Copyright
Copyright © Materials Research Society 1985

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