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Generation of Shock Waves in Confined Excimer Laser Ablation of Polyimide

Published online by Cambridge University Press:  25 February 2011

Adrian D. Zweig  and
T.F. Deutsch
Adrian D. Zweig
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Boston, MA 02114
T.F. Deutsch
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Boston, MA 02114
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Abstract

We study acoustic effects associated with the ablation of polyimide under water confinement. Ablation launches a shock in the target. After the shock propagates into the surrounding water we measure its velocity with an optical probe system. In the water the shocks decay after propagating a few hundred microns. The peak shock pressure scales with the square root of the laser fluence. Our observations can be explained by a simple model that interprets the generated pressures as being due to the heating of a confined ideal gas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 47
Copyright
Copyright © Materials Research Society 1992

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