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Generation of Shock Waves in Confined Excimer Laser Ablation of Polyimide

Published online by Cambridge University Press:  25 February 2011

Adrian D. Zweig
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Boston, MA 02114
T.F. Deutsch
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Boston, MA 02114
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Abstract

We study acoustic effects associated with the ablation of polyimide under water confinement. Ablation launches a shock in the target. After the shock propagates into the surrounding water we measure its velocity with an optical probe system. In the water the shocks decay after propagating a few hundred microns. The peak shock pressure scales with the square root of the laser fluence. Our observations can be explained by a simple model that interprets the generated pressures as being due to the heating of a confined ideal gas.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

[1]Harris, P. and Presles, H.N., J. Chem. Phys. 77, 5157 (1982)CrossRefGoogle Scholar
[2]Dyer, P.E. and Srinivasan, R., Appl. Phys. Lett. 48, 445 (1986)Google Scholar
[3]Cross, F.W., Al-Dhahir, R.K. and Dyer, P.E., J. Appl. Phys. 64, 2194 (1988)CrossRefGoogle Scholar
[4]Doukas, A.G., Zweig, A.D., Frisoli, J.K., Birngruber, R. and Deutsch, T.F., Appl. Phys. B 53 (1991), in pressGoogle Scholar
[5]Taylor, R.S., Singleton, D.L. and Paraskevopoulos, G., Appl. Phys. Lett. 50, 1779 (1987)CrossRefGoogle Scholar
[6]Dyer, P.E. and Sidhu, J., J. Appl. Phys. 57, 1420 (1985)Google Scholar
[7]Harris, P. and Presles, H.N., J. Chem. Phys. 74, 6864 (1981)CrossRefGoogle Scholar
[8]Griffin, R.D., Justus, B.L., Campillo, A.J. and Goldberg, L.S., J. Appl. Phys. 59, 1968 (1986)CrossRefGoogle Scholar
[9]Fabbro, R., Fournier, J., Ballard, P., Devaux, D. and Virmont, J., J. Appl. Phys. 86, 775 (1990)Google Scholar
[10]Herzberg, G., Molecular spectra and molecular structure. II. Infrared and Raman spectra of polvatomic molecules, (D. van Nostrand Co., Princeton NJ, 1968) pp. 501519.Google Scholar
[11]Brannon, J.H., Lankard, J.R., Baise, A.I., Burns, F. and Kaufmann, J., J. Appl. Phys. 58, 2036 (1985)Google Scholar
[12] Srinivasan, R., Braren, B. and Dreyfus, R.W., J. Appl. Phys. 61 (1987)Google Scholar