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Generalized Ellipsometry Using a Rotating Sample

Published online by Cambridge University Press:  17 March 2011

Weiliang Xu ,
Lowell T. Wood  and
Terry D. Golding
Lowell T. Wood
Affiliation:
Department of Physics, University of Houston, Houston, Texas 77204-5506, U.S.A
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Abstract

We propose a generalized ellipsometric technique using a rotating sample. The ellipsometer consists of a polarizer, a rotatable sample holder, an analyzer, and a detector. Fourier coefficients are measured and used to extract the system’s dielectric tensors and film thicknesses. The main advantage of the technique is that all parts of the ellipsometer are fixed except the sample, whose azimuth angle can be modulated. We show calculated responses to isotropic and anisotropic materials as well as superlattices. Potential applications for characterizations of anisotropic nanostructures are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 635: Symposium C – Anisotropic Nanoparticles-Synthesis, Characterization & Applications , 2001 , C4.42
Copyright
Copyright © Materials Research Society 2001

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References

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