Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-05T02:06:31.349Z Has data issue: false hasContentIssue false
  • English
  • Français

Gallium zinc oxide coated polymeric substrates for optoelectronic applications

Published online by Cambridge University Press:  15 February 2011

E. Fortunato ,
A. Gonçalves ,
A. Marques ,
V. Assunção ,
I. Ferreira ,
H. Águas ,
L. Pereira  and
R. Martins
E. Fortunato
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
A. Gonçalves
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
A. Marques
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
V. Assunção
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
I. Ferreira
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
H. Águas
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
L. Pereira
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
R. Martins
Affiliation:
Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon, Campus da Caparica, 2829-516 Caparica, Portugal.
Get access

Abstract

Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80 %. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 769: Symposium H – Flexible Electronics - Materials and Device Technology , 2003 , H9.4
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Assuno, V., Fortunato, E., Marques, A., guas, H., Ferreira, I., Costa, M.E.V., and Martins, R., Thin Solid Films 427, 401 (2003).Google Scholar
2. Fortunato, E., Nunes, P., Costa, D., Brida, D., Ferreira, I., Martins, R., Vacuum 64, 233 (2002).Google Scholar
3. Fortunato, E., Nunes, P., Marques, A., Costa, D., guas, H., Ferreira, I., Costa, M.E.V., Godinho, M.H., Almeida, P.L., Borges, J.P., Martins, R., Surface and Coatings Technology 151-152, 247 (2002).Google Scholar
4. Hao, X., Ma, J., Zhang, D., Yang, T., Ma, H., Yang, Y., Cheng, C., Huang, J., Appl. Surf. Sci. 183, 137 (2001).Google Scholar
5. Coutts, T.J., Young, D.L., Li, X., MRS Bull. 25, 58 (2000).Google Scholar
6.Kaladex® 1020, DuPont Teijin Films, Technical data sheet KX TD 005 - K1020.Google Scholar
7. Ellmer, K., J. Phys. D.: Appl. Phys. 33, R17 (2000).Google Scholar