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Fundamentals of Laser Photochemistry for Surface Modification

Published online by Cambridge University Press:  26 February 2011

M. Stake ,
Y. Zhang  and
S. Küper
M. Stake
Affiliation:
Max-Planck-Institut für biophysikalische ChemieP.O. Box 2841, D-3400 Göttingen, FR Germany
Y. Zhang
Affiliation:
Max-Planck-Institut für biophysikalische ChemieP.O. Box 2841, D-3400 Göttingen, FR Germany
S. Küper
Affiliation:
Max-Planck-Institut für biophysikalische ChemieP.O. Box 2841, D-3400 Göttingen, FR Germany
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Abstract

Examples for the role of elementary photochemical processes for laser induced modification of surfaces by deposition - using aluminum-alkyls -, and etching - using excimer induced ablation - are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 139
Copyright
Copyright © Materials Research Society 1998

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