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Fundamental Mechanisms in Laser and Electron Beam Processing of Semiconductors

Published online by Cambridge University Press:  15 February 2011

Walter L. Brown
Walter L. Brown
Affiliation:
Bell Laboratories, Murray Hill, N. J. 07974, USA
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Abstract

A few of the new developments in understanding transient laser and electron beam processes in semiconductors and a few of the still unresolved questions are summarized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1: Symposium – Laser and Electron-Beam Solid Interactions in Materials Processing , 1980 , 1
Copyright
Copyright © Materials Research Society 1981

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References

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