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Functionalization and Environmental Stabilization of ZnO Nanobridge Sensors Fabricated using Carbonized Photoresist

Published online by Cambridge University Press:  23 August 2011

Ashley D. Mason ,
Chien-Chih Huang ,
Myra T. Koesdjojo ,
Nate D. Stephon ,
Vincent T. Remcho  and
John F. Conley Jr.
Ashley D. Mason
Affiliation:
School of Electrical Engineering and Computer Science
Chien-Chih Huang
Affiliation:
School of Electrical Engineering and Computer Science
Myra T. Koesdjojo
Affiliation:
Department of Chemistry, Oregon State University, Corvallis, OR 97331, U.S.A.
Nate D. Stephon
Affiliation:
School of Electrical Engineering and Computer Science
Vincent T. Remcho
Affiliation:
Department of Chemistry, Oregon State University, Corvallis, OR 97331, U.S.A.
John F. Conley Jr.
Affiliation:
School of Electrical Engineering and Computer Science
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Abstract

ZnO nanobridge sensors were selectively grown and electrically connected using lithographically patterned carbonized photoresist (C-PR). As ZnO is known to dissolve in deionized (DI) water, parylene-A was investigated as a moisture barrier and potential functionalization platform. A chemical vapor deposition (CVD) process for parylene-A was developed and it was demonstrated that parylene-A coated ZnO NWs do not show any signs of dissolution after 24 hours in an aqueous solution. The impact of the parylene-A coating on the electrical performance and sensitivity of ZnO nanobridge devices was investigated. A comparison of UV, O2, and H2O sensitivity between uncoated and coated devices revealed that a thin coating of parylene-A attenuated all of these responses, suggesting the ability to modulate environmental sensitivity using this non-covalently bound polymer passivation layer.

Keywords

sensornanoscalenucleation & growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1350: Symposium EE – Semiconductor Nanowires—From Fundamentals to Applications , 2011 , mrss11-1350-ee11-06
Copyright
Copyright © Materials Research Society 2011

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