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From Intelligent Materials to Smart Sensors: a-Si:H Position Sensitive Detectors

Published online by Cambridge University Press:  10 February 2011

E. Fortunato ,
M. Fernandes ,
F. Soares ,
G. Lavareda  and
R. Martins
E. Fortunato
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
M. Fernandes
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
F. Soares
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
G. Lavareda
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
R. Martins
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
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Abstract

This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (ID TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 gm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 420: Symposium A – Amorphous Silicon Technology-1996 , 1996 , 165
Copyright
Copyright © Materials Research Society 1996

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References

1. Kawasaki, A., Goto, M., Yashiro, H. and Ozaki, H., Sensors & Actuators A21–A23, 529 (1990).Google Scholar
2. Hamakawa, Y., in Proceedings of the Technical Digest of the 6th International Photovoltaic Conference (New Delhi, 1992), p. 3.Google Scholar
3. Fortunato, E., Martins, R., Soares, F. and Lavareda, G., Mat. Res. Symp. Proc. 377, 797 (1995).Google Scholar
4. Fortunato, E., Ph.D Thesis, FCT-UNL, Portugal, 1995.Google Scholar
5. Soares, F. and Martins, R. (private communication).Google Scholar
6. Kawasaki, A. and Goto, M., Sensors & Actuators A21–A23, 534 (1990).Google Scholar