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From Ferroelectrics to Polymers - Perspectives for Thin Film Optical Waveguides and Devices

Published online by Cambridge University Press:  10 February 2011

Christoph Buchal
Christoph Buchal*
Affiliation:
Forschungszentrum Juelich GmbH, ISI-IT, D-52425 Juelich, Germany, [email protected]
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Abstract

Presently commercial optical fiber links experience an explosive growth. On the other hand, the integration of optical functions on a single substrate (“Integrated Optical Device”) is still mostly limited to the R & D-laboratories. Only Mach-Zehnder modulators, made from ferroelectric crystals, have found commercial applications so far. The development phase of the integrated optical devices, based on bulk crystalline LiNbO3, is now covering a time span of nearly 30 years. In comparison, the development of the thin film growth of optical oxide ferroelectrics or of tailored optical polymers is just a few years old and we are still at the beginning of the learning curve.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 597: Symposium PP – Thin Films for Optical Waveguide Devices & Materials … , 1999 , 133
Copyright
Copyright © Materials Research Society 2000

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References

[1] Wessels, B. W., Marder, S. R., Walba, D. M., Thin Films for Integrated Optics Applications, Mat. Res. Soc. Symp. Proc. 392 (1995)Google Scholar
[2] Fork, D. K., F. Armani-Leplingard, Kingston, J. J., Anderson, G. B., Thin Film EpitaxialOxide Optical Waveguides, Mat. Res. Soc. Symp. Proc. 392 (1995) 189 Google Scholar
[3] Nishihara, H., Haruna, M., Suhara, T., Optical Integrated Circuits, McGraw-Hill Book Company, New York (1985)Google Scholar
[4] Ch. Buchal, Withrow, S. P., White, C. W., Poker, D. B., Ion Implantation of Optical Materials, Annu. Rev. Mat. Sci. 24 (1994) 125 Google Scholar
[5] Buchal, Ch., Fluck, D., Günter, P., Ion Implantation of Optical Ferroelectrics, J. of Electroceramics 3 (1999) 179 Google Scholar
[6] Sohler, W., Suche, H., Erbium Doped Lithium Niobate Waveguide Devices, in: Design and Application of Integrated Optical Circuits and Components, ed. Murphy, E., Marcel Dekker (1999) 127 Google Scholar
[7] Lee, S. Y., Route, R. K., Feigelson, R. S., The Growth of Optical Quality LiNbO3 Thin Filmson Sapphire and LiTaO3 Substrates Using Solid-Source MOCVD in: Thin Films for Integrated Optics Applications, eds. B. W. Wessels, S. R. Marder, D. M. Walba, Mat. Res. Soc. Symp. Proc. 392 (1995) 177 Google Scholar
[8] Clem, P. G., Payne, D. A., Heteroepitaxy and Waveguide Formation for SolutionDeposited LiNbO3 Thin Layers in: Thin Films for Integrated Optics Applications, eds. B.W. Wessels, S. R. Marder, D. M. Walba, Mat. Res. Soc. Symp. Proc. 392 (1995)Google Scholar
[9] Lee, S.-H., Noh, T. W., Lee, J.-H., Control of Epitaxial Growth of Pulsed Laser Deposition LiNbO3 Films and Their Electro-Optic Effects, Appl. Phys. Left. 68 (4) (1996) 472 Google Scholar
[10] Bauer, St., Beckers, L., Fleuster, M., Schubert, J., Zander, W., Buchal, Ch., Epitaxy of Erbium Doped LiNbO3 Films produced by Pulsed Laser Deposition, Mat. Res. Soc.Symp. Proc. 341 (1994) 283 Google Scholar
[11] Bauer, St., Epitaktisches Wachstum von Lithiumniobat auf Saphir, Thesis Rep. Res.Center Jülich No. 3056 (1995)Google Scholar
[12] Zgonik, M., Bernasconi, P., Duelli, M., Schlesser, R., Günter, P., Garrett, M. H., Rytz, D., Zhu, Y., Wu, X., Dielectric, Elastic, Piezoelectric, Electro-Optic, and Elasto-Optic Tensors ofBaTiO3 Crystals, Phys. Rev. B 50 (9) (1994) 50 Google Scholar
[13] Gill, D. M., Conrad, C. W., Ford, G., Wessels, B. W., Ho, S. T., Thin Film ChannelWaveguide Electro-Optic Modulator in Epitaxial BaTiO3 , Appl. Phys. Lett. 71 (13) (1997) 1783 D. M. Gill, B. A. Block, C. W. Conrad, B. W. Wessels, S. T. Ho, Thin Film ChannelWaveguides Fabricated in Metalorganic Chemical Vapor Deposition Grown Ba TiO3 on MgO Appl. Phys. Lett. 69 (20) (1996) 2968Google Scholar
[14] McKee, R. A., Walker, F. J., Chisholm, M. F., Crystalline Oxides on Silicon: The First FiveMonolayers, Phys. Rev. Lett. 81 (4) (1998) 3014 R. A. McKee, F. J. Walker, E. D. Specht, G. E. Jellison, L. A. Boatner, J. H. Harding,Interface Stability and the Growth of Optical Quality Perovskites on MgO, Phys. Rev.Lett. 27 (17) (1994) 2741 F. J. Walker, R. A. McKee, H.-W. Yen, D. E. Zelmon, Optical Clarity and WaveguidePerformance of Thin Film Perovskites on MgO, Appl. Phys. Lett. 65 (1994) 1495Google Scholar
[15] Scott, J. F., The Physics of Ferroelectric Ceramic Thin Films for Memory Applications, in: Ferroelectrics Review 1 (1) (1998)Google Scholar
[16] Desu, S. B., Influence of Stresses on the Properties of Ferroelectric BaTiO3. Thin Films, J. Electrochem. Soc. 140 (10) (1993) 2981 Google Scholar
[17] Frey, M. H., Payne, D. A., Nanocrystalline Barium Titanate: Evidence for the Absence of Ferroelectricityin Sol-Gel Derived Thin-Layer Capacitors, Appl. Phys. Lett. 63 (20) (1993) 2753 Google Scholar
[18] Pertsev, N. A., Zembilgotov, A. G., Tagantsev, A. K., Effect of Mechanical Boundary Conditions on Phase Diagrams of Epitaxial Ferroelectric Thin Films, Phys. Rev. Lett. 80(9) (1998) 1988 Google Scholar
[19] Pertsev, N. A., Zembilgotov, A. G., Hoffmann, S., Waser, R., Tagantsev, A. K., Ferroelectric Thin Films Grown on Tensile Substrates: Renormalization of the Curie-Weiss Law and Apparent Absense of Ferroelectricity, J. Appl. Phys. 85 (3) (1999) 1698 Google Scholar
[20] Waser, R., Hoffmann, S., Microstructure-Property Relationship of (Ba, Sr) TiO3 Films, J. Korean Phys. Soc. 32 (1998) S1340 Google Scholar
[21] Speck, J. S., Pompe, W., Domain Configurations Due to Multiple Misfit Relaxation Mechanisms in Epitaxial Ferroelectric Thin Films, I. Theory, J. Appl. Phys. 76 (1) (1994)Google Scholar
[22] Beckers, L., Schubert, J., Zander, W., Ziesmann, J., Eckau, A., Leinenbach, P., Buchal, Ch., Structural and Optical Characterization of Epitaxial Waveguiding BaTiO3 Thin Films on MgO, J. Appl. Phys. 83 (6) (1998) 3305 Google Scholar
[23] Buchal, Ch., Beckers, L., Eckau, A., Schubert, J., Zander, W., Epitaxial BaTi0 3 Thin Films on MgO, Mat. Sci. & Eng. B 56 (1998) 234 Google Scholar
[24] Yoneda, Y., Kasatani, H., Terauchi, H., Yano, Y., Terashima, T, Bando, Y., Ferroelectric Phase Transition in BaTiO3 Films, J. of Crystal Growth 150 (1995) 1090 Google Scholar
[25] Hoerman, B. H., Ford, G. M., Kaufmann, L. D., Wessels, B. W., Dielectric Properties of Epitaxial BaTiO3 Thin Films, Appl. Phys. Lett. 73 (16) (1998) 2248 Google Scholar
[26] Lu, H. A., Wills, L. A., Wessels, B. W., Lin, W. P., Zhang, T. G., Wong, G. K., Neumayer, D. A., Marks, T. J., Second-Harmonic Generation of Poled BaTiO3 Thin Films, Appl.Phys. Lett. 62 (12) 1314 Google Scholar
[27] Bihari, B., Kumar, J., Stauf, G. T., Buskirk, P. C. Van, Hwang, C. S., Investigation of Barium Titanate Thin Films on MgO Substrates by Second-Harmonic Generation, J. Appl. Phys.76 (2) 1169Google Scholar
[28] Okada, T., Nakata, Y., Kaibara, H., Maeda, M., Second-Harmonic Generation in Pulsed-Laser-Deposited BaTiO3 Thin Films, Jpn. J. Appl. Phys. 34 (2) (1995) L1536 Google Scholar
[29] Xuan, L.-Z., Pan, S.-H., Chen, Z.-H., Wang, R.-P., Shi, W.-S., Li, C.-L., Second-Harmonic Generation in BaTiO3 Films Doped with Cerium, Appl. Phys. Lett. 73 (20) (1998) 2896 Google Scholar
[30] Lu, Y., Jin, G.-H., Cronin-Golomb, M., Liu, S.-W., Jiang, H., Wang, F.-L., Zhao, J., Wang, S.-Q., Drehman, A. J., Fabrication and Optical Characterization of Pb(Mg1/3 Nb2/3)O3-PbTiO3 Planar Thin Film Optical Waveguides Appl. Phys. Lett. 72 (23) (1998) 2927 Google Scholar
[31] Marx, J. M., Eknoyan, O., Taylor, H. F., Tang, Z., Neurgaonkar, R. R., Electro-Optic Modulation and Self-Poling in Strain-Induced Waveguides in Barium Strontium Titanate Niobate, Appl. Phys. Lett. 67 (10) (1995) 1381 Google Scholar
[32] Lei, C. H., Jia, C. L., Siegert, M., Schubert, J., Buchal, Ch., Urban, K., Microstructure and Orientation Relations of BaTiO3/MgO/YSZ Multilayers Deposited on Si(O01) Substrates by Laser Ablation, J. of Crystal Growth 204 (1999) 137 Google Scholar
[33] Lisoni, J. G., Siegert, M., Lei, C. H., Jia, C. L., Schubert, J., Zander, W., Buchal, Ch., BaTiO3 Waveguides on MgO Buffered-Sapphire Single Crystals, submitted to MRS Fall Meeting, Symp. Z (1999)Google Scholar
[34] Siegert, M., Lisoni, J. G., Lei, C. H., Eckau, A., Zander, W., Schubert, J., Buchal, Ch., Epitaxial BaTiO3 Thin Films on Different Substrates for Optical Waveguide Applications, submitted to MRS Fall Meeting, Symp. Z (1999)Google Scholar
[35] Nashimoto, K., Nakamura, S., Moriyama, H., Watanabe, M., Osakabe, E., Electro-optic Beam Deflector Using Epitaxial Pb(Zr, Ti)O3 Waveguides on Nb-Doped SrTiO3 , Appl.Phys. Lett. 73 (3) (1998) 303 Google Scholar
[36] Nashimoto, K., Nakamura, S., Morikawa, T., Moriyama, H., Watanabe, M., Osakabe, E., Fabrication of Electro-optic Pb(Zr, Ti)O3 Heterostructure Waveguides on Nb-Doped SrTiO3 by Solid-Phase Epitaxy, Appl. Phys. Lett. 74 (19) (1999) 2761 Google Scholar
[37] Nashimoto, K., Haga, K., Watanabe, M., Nakamura, S., Osakabe, E., Patterning of (Pb, La)(Zr, Ti)O3 Waveguides for Fabricating Micro-Optics Using Wet Etching and Solid-Phase Epitaxy, Appl. Phys. Lett. 75 (8) (1999) 1054 Google Scholar
[38] Nashimoto, K., Nakamura, S., Morikawa, T., Moriyama, H., Watanabe, M., Osakabe, E., Electrooptical Properties of Heterostructure (Pb, La) (Zr, Ti)O3 Waveguides on Nb-SrTiO3 , Jpn. J. Appl. Phys. 38 (1) (1999) 5641 Google Scholar
[39] Nashimoto, K., Nakamura, S., Moriyama, H., Haga, K., Watanabe, M., Morikawa, T., Osakabe, E., Takeda, T., Integrated (Pb, La) (Zr, Ti)O3 Heterostructure Waveguide Devices Fabricated by Solid-Phase Epitaxy, Mat. Res. Soc. Symp. Proc., this issueGoogle Scholar
[40] Steier, W. H., Chen, A., Lee, S.-S., Garner, S., Zhang, H., Chuyanov, V., Dalton, L. R., Wang, F., Ren, A. S., Zhang, C., Todorova, G., Harper, A., Fetterman, H. R., Chen, D., Udupa, A., Bhattacharya, D., Tsap, B., Polymer Electro-Optic Devices for Integrated Optics, Chem. Phys. 245 (1999) 487 Google Scholar