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Formation Mechanism of Microporous Silicon: Predictions and Experimental Results

Published online by Cambridge University Press:  28 February 2011

V. Lehmann  and
U. Gösele
V. Lehmann
Affiliation:
Siemens, Dept. ZFE BT ACM 42,8000 Munich 83, Otto-Hahn-Ring 6, Germany
U. Gösele
Affiliation:
Duke Univ., School of Engineering, Durham, NC 27706, USA
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Abstract

Recently we presented a formation mechanism for micro-porous silicon which is based on a depletion of holes in the porous region due to quantum confinement. This theory allows predictions concerning the dependence of the porous morphology on the formation conditions. It is the purpose of this work to check whether these predictions are in accordance with experimental observations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 283: Symposium F – Microcrystalline Semiconductors–Materials Science and Devices , 1992 , 27
Copyright
Copyright © Materials Research Society 1993

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References

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