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Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles

Published online by Cambridge University Press:  30 September 2013

Ashley E. Wayman ,
Daniel K. Turner ,
Ashwani Rawat ,
Colin T. Carver ,
Mansour Moinpour  and
Edward E. Remsen
Ashley E. Wayman
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
Daniel K. Turner
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
Ashwani Rawat
Affiliation:
Fab Materials Operation, Intel Corporation, Santa Clara, CA 95052, U.S.A.
Colin T. Carver
Affiliation:
Components Research, Intel Corporation, Hillsboro, OR 97124, U.S.A.
Mansour Moinpour
Affiliation:
Fab Materials Operation, Intel Corporation, Santa Clara, CA 95052, U.S.A.
Edward E. Remsen
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
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Abstract

Additive-abrasive interactions in chemical-mechanical planarization (CMP) slurries are investigated using fluorescence correlation spectroscopy (FCS). The FCS technique provides quantitative determinations of the interaction between additives and abrasive particles by characterizing the competitive adsorption of the additive and a fluorescent probe molecule by an abrasive particle. Adsorption of the CMP additives glycine and benzotriazole (BTA) on precipitated and sol-gel colloidal silica abrasives are characterized. Significant differences in the fluorescent probe’s adsorption to the different silica abrasives in the presence of the additives suggest surface chemistry differences between the different types of silica. Extensions of the analysis of FCS data are proposed for improving the quantitative determination of the competitive adsorption of fluorescent probe dyes and CMP additives on abrasive particles.

Keywords

CMPadsorptionluminescence
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1560: Symposium BB – Evolutions in Planarization—Equipment, Materials, Techniques and Applications , 2013 , mrss13-1560-bb04-04
Copyright
Copyright © Materials Research Society 2013 

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References

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