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Flow Tube Kinetics of Gas-Phase Cvd Reactions
Published online by Cambridge University Press: 22 February 2011
Abstract
This paper explores the use of a flow-tube reactor coupled to an FTIR spectrometer to study gas-phase chemical reactions in CVD systems. We show that our apparatus can generate reliable kinetics data by reproducing the literature rate constant for the reaction between O3 and isobutene. We present data from this apparatus on two technologically important systems: TiN from Ti(NMe2)4 (TDMAT) and NH3 and SiO2 from tetraethoxysilane (TEOS) and O3. The results presented include kinetics data for the reaction of Ti(NMe2)4 with NH3 and ND3 at room temperature and the IR spectra of the products from the reaction of TEOS with O3 at 175°C.
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- Copyright © Materials Research Society 1994
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