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The Finite Electromigration Boundary Value Problem

Published online by Cambridge University Press:  21 February 2011

J.R. Lloyd  and
J. Kitchin
J.R. Lloyd
Affiliation:
Max-Planck-Institut für Metallforschung, Institut für Werkstoffwissenschaft, 71 Seestraβe, Stuttgart, Germany
J. Kitchin
Affiliation:
Digital Equipment Corporation, 77 Reed Road, Hudson MA 01749-2895
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Abstract

The solution to the finite electromigration boundary value problem has been obtained for the case of a blocking boundary downstream and a constant vacancy concentration upstream. The results are similar to the solution to the semi-infinite problem [1] except in the vicinity of the steady state. Consequences of achieving a “sub-threshold” steady state profile are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 309: Symposium M2 – Materials Reliability in Microelectronics III , 1993 , 339
Copyright
Copyright © Materials Research Society 1993

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References

1) Shatzkes, M. and Lloyd, J.R., J. Appl. Phys., 59, 3890 (1986)Google Scholar
2) Lloyd, J.R. and Kitchin, J., J. Appl. Phys., 69, 2117 (1991)Google Scholar
3) Kitchin, J. and Lloyd, J.R., MRS Proc. Vol. 225, 27 (1991)Google Scholar
4) Blech, I.A., J. Appl. Phys., 47, 1203 (1976)Google Scholar
5) Lloyd, J.R., Appl. Phys. Lett., 57, 1167 (1990)Google Scholar
6) Goot, S.R. De, Physica, 9, 699 (1942)Google Scholar
7) Private Communication, Oates, A.S. (1993)Google Scholar
8) Lloyd, J.R. and Kitchin, J. submitted for publication J. Mater. Res. (1993)Google Scholar
9) Kinsbron, E., Appl. Phys. Lett., 36, 968 (1980)Google Scholar
10) Lloyd, J.R., Smith, P.M. and Prokop, G.S., Thin Solid Films, 93,385 (1982)Google Scholar
11) Atakov, E.M., Clement, J.J., and Miner, B., this conferenceGoogle Scholar
12) Clement, J.J. and Lloyd, J.R., 3. Appl. Phys., 71, 1730 (1992)Google Scholar