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Fine Structure of Sputtered Ni/Ti Multilayered Thin Films Studied by HREM

Published online by Cambridge University Press:  15 February 2011

M. J. Casanove ,
E. Snoeck ,
C. Roucau ,
J. L. Hutchison ,
Z. Jiang  and
B. Vidal
M. J. Casanove
Affiliation:
Cemes - Loe, CNRS, B.P. 4347, 31055 Toulouse cedex, France.
E. Snoeck
Affiliation:
Cemes - Loe, CNRS, B.P. 4347, 31055 Toulouse cedex, France.
C. Roucau
Affiliation:
Cemes - Loe, CNRS, B.P. 4347, 31055 Toulouse cedex, France.
J. L. Hutchison
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K.
Z. Jiang
Affiliation:
Faculté des Sciences de St. Jérôme, 13397 Marseille cedex, France.
B. Vidal
Affiliation:
Faculté des Sciences de St. Jérôme, 13397 Marseille cedex, France.
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Abstract

Ni/Ti multilayered thin films can be efficient neutron guides and are therefore of great interest in neutron optics. Ni/Ti and NiC/Ti multilayers with various layer thicknesses were fabricated by magnetron sputtering and characterized by high resolution transmission electron microscopy (TEM). The TEM studies, performed on cross-sectional specimens, revealed that both kinds of layers were textured and snowed coherence in the growth direction. The presence of a 2 nra thick amorphous zone at the Ni/Ti interface in the carbon free thin films was also confirmed. On the contrary, sharp interfaces were obtained in NiC/Ti multilayers. The fine structure of the different layers will also be reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 277
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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