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FIB-assisted Pt Deposition for Carbon Nanotube Integration and 3-D Nanoengineering

Published online by Cambridge University Press:  11 February 2011

K. Dovidenko ,
J. Rullan ,
R. Moore ,
K. A. Dunn ,
R. E. Geer  and
F. Heuchling
K. Dovidenko
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
J. Rullan
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
R. Moore
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
K. A. Dunn
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
R. E. Geer
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
F. Heuchling
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
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Abstract

In this study, the Focused Ion Beam (FIB) instrument has been used for carbon nanotubes integration and nanoegineering studies. Results of thorough investigation (electrical, structural and chemical) of ultra-thin Pt contact lines and pads fabricated by the FIB, along with evaluation of nanomodification of the carbon nanotubes under the Ga+ ion beam and during Pt deposition are presented. The initial stages of FIB-assisted Pt deposition on multi-wall nanotubes are studied by transmission electron microscopy (TEM). The FIB parameters are optimized to provide non-destructive imaging and controllable Pt deposition with minimal damage on the nanotubes. We have demonstrated effective use of FIB-fabricated Pt pads as means of attaching the nanotubes to the substrate for atomic force and ultrasonic force microscopy studies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H7.7
Copyright
Copyright © Materials Research Society 2003

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References

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