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Ferroelectric PTCR Films for Photonic Crystal Gas Sensor

Published online by Cambridge University Press:  01 February 2011

J. RaviPrakash ,
Susan Trolier-McKinstry ,
Jing-Gong Cheng ,
Mark McNeal ,
Anton Greenwald ,
Irina Puscasu ,
Edward Johnson ,
Martin Pralle  and
Ashak Shah
J. RaviPrakash
Affiliation:
[email protected], ICX - Ion Optics, R&D, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452-8484, United States, 7817888777 x111, 7817888811
Susan Trolier-McKinstry
Affiliation:
[email protected], Pennsylvania State University, 151 Materials Research Laboratory, University Park, PA, 16802, United States
Jing-Gong Cheng
Affiliation:
[email protected], Pennsylvania State University, 151 Materials Research Laboratory, University Park, PA, 16802, United States
Mark McNeal
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
Anton Greenwald
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
Irina Puscasu
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
Edward Johnson
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
Martin Pralle
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
Ashak Shah
Affiliation:
[email protected], Ion Optics, 411 Waverley Oaks Road, Suite 144, Waltham, MA, 02452, United States
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Abstract

We examined lanthanum doped lead barium titanate films for temperature measurements of photonic crystal - MEMS devices. Films were deposited by sol-gel techniques and crystallized in air above 650°C. X-ray diffraction spectra consistent with the perovskite structure were detected. The room temperature dielectric constant was ∼570 at 10 kHz of La-doped (0.3 mol%) Pb0.3Ba0.7TiO3 films. These films had a remanent polarization of ∼20μC/cm2 and a coercive field of 145 kV/cm. The leakage current density was ∼ 2×10−7 amps/cm2 at 100 kV/cm field. The resistivity of the films extracted from the linear region of the I-V data (electric fields in excess of 100 kV/cm) measured as a function of temperature shows an increase in resistivity at temperatures above Tc (120°C for BaTiO3 and 240°C for Pb0.3Ba0.7TiO3) of the film consistent with positive coefficient of resistance (PTCR) effect. However, the change in resistance was small when compared to bulk samples of similar compositions.

Keywords

ferroelectricmicroelectro-mechanical (MEMS)sensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 952: Symposium F – Integrated Nanosensors , 2006 , 0952-F10-08
Copyright
Copyright © Materials Research Society 2007

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References

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