Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-25T17:32:39.802Z Has data issue: false hasContentIssue false
  • English
  • Français

Fault Structures in CVD Silicon Nitride

Published online by Cambridge University Press:  21 February 2011

T.M. Shaw ,
J.W. Steeds  and
D.R. Clarke
T.M. Shaw
Affiliation:
Structural Ceramics Group, Rockwell International Science Center, Thousand Oaks, California 91360
J.W. Steeds
Affiliation:
Physics Dept., University of Bristol, England
D.R. Clarke
Affiliation:
Materials Science Dept., MIT, Cambridge, Mass.
Get access

Abstract

Fault structures occurring in crystalline CVD silicon nitride deposits have been examined using transmission electron microscopy. A variety of mixed rotation and displacement faults are observed. The faults have extensive basal plane facets but also extend onto other planes within the grains. Possible structures for the faults are discussed with reference fo the structures of the a and P silicon nitride polymorphs.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983 , 325
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Morosanu, C.E., Thin Solid Films 65 171–208 (1980).Google Scholar
2. Galasso, F., Kuntz, U. and Croft, W.J., J. Am. Ceram. Soc. 55, 431–432 (1972)Google Scholar
3. Airey, A.C., Clarke, S. and Popper, P., Proc. Brit. Ceram. Soc. 22, 305 (1973).Google Scholar
4. Kiihara, K. and Hirai, T., J. Mater. Sci. 11, 593–603 (1976).Google Scholar
5. Hirai, T. and Hayashi, S., J. Amer. Ceram. Soc. 64, C88 (1981).Google Scholar
6. Hirai, T. and Hayashi, S., J. Mat. Sci. 17, 1320 (1982).Google Scholar
7. Jack, K.H. in “Progress in Nitrogen Ceramics,” proceedings of NATO Advanced Study Institute, Ed., Riley, F.L. published Martinus Nijhoff (1983).Google Scholar
8. Wild, S., Grieveson, P. and Jack, K.H. in “Special Ceramics,” 5 385–395, ed. Popper, P., published British Ceramic Research Association (1970).Google Scholar