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Fault Structures in CVD Silicon Nitride
Published online by Cambridge University Press: 21 February 2011
Abstract
Fault structures occurring in crystalline CVD silicon nitride deposits have been examined using transmission electron microscopy. A variety of mixed rotation and displacement faults are observed. The faults have extensive basal plane facets but also extend onto other planes within the grains. Possible structures for the faults are discussed with reference fo the structures of the a and P silicon nitride polymorphs.
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- Copyright © Materials Research Society 2006
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