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Fast Dosimeter Film For Evaluation Of X-Ray Lithography Sources

Published online by Cambridge University Press:  15 February 2011

Juan R. Maldonado  and
Andrew Pomerene
Juan R. Maldonado
Affiliation:
IBM FSC Manassas, VA Mailing Address: IBM TPO, Rt. 52, Zip 399, Hopewell Jct., N.Y. 12533
Andrew Pomerene
Affiliation:
IBM T.J. Watson Research Center Yorktown Heights, N.Y.. 110598
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Abstract

This paper presents data on the soft x-ray behavior of the photochromic dosimeter film UVSC manufactured by Sensor Physics. In particular, the x-ray sensitivity measured with synchrotron storage ring x-ray sources will be presented and compared with a presently used dosimeter film which is many times less sensitive. Relevant properties of the film for x-ray source evaluation also will be presented together with data obtained with other x-ray lithography sources.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 306: Symposium K – Materials Aspects of X-Ray Lithography , 1993 , 175
Copyright
Copyright © Materials Research Society 1993

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References

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