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Fabrication of Supported Catalytic Nickel Clusters of Controlled Size and Distribution Using Ionized Cluster Beam Deposition

Published online by Cambridge University Press:  28 February 2011

M. C. Yoo  and
K. Kim
M. C. Yoo
Affiliation:
Materials Research Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
K. Kim
Affiliation:
Materials Research Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
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Abstract

A novel technique for fabricating uniform, ultrafine metal clusters of controlled size and distribution is described. The technique employs conventional adiabatic expansion of an evaporated source material for controlled formation of the clusters, but additionally incorporates electron-impact ionization and acceleration for further control of the size and distribution of the deposited particles. The key control parameters investigated are the diameter of the adiabatic nozzle, the proportion and energy of the ionized particles in the cluster beam, the substrate temperature, and the deposition time. The use of electron irradiation and acceleration of the source beam has proven to be particularly effective in producing monodisperse clusters. Using this new approach, uniform Ni clusters as small as 10 Å were deposited on an amorphous carbon substrate. The size and structure of the deposited Ni clusters were analyzed using high-resolution TEM and STEM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 409
Copyright
Copyright © Materials Research Society 1991

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References

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