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Fabrication of SnO2 Nano Patterns Using Surface Relief Grating

Published online by Cambridge University Press:  01 February 2011

Fadong Yan ,
Lian Li ,
Pilho Huh ,
Yanping Wang ,
Lynne A Samuelson  and
Jayant Kumar
Fadong Yan
Affiliation:
[email protected], University of Massachusetts Lowell, Center for Advanced Materials, One University Ave., Lowell, MA, 01854, United States
Lian Li
Affiliation:
[email protected], University of Massachusetts Lowell, Center for Advanced Materials, Lowell, MA, 01854, United States
Pilho Huh
Affiliation:
[email protected], University of Massachusetts Lowell, Center for Advanced Materials, Lowell, MA, 01854, United States
Yanping Wang
Affiliation:
[email protected], University of Massachusetts Lowell, Center for Advanced Materials, Lowell, MA, 01854, United States
Lynne A Samuelson
Affiliation:
[email protected], U. S. Army Natick Soldier Development and Engineering Center, Natick, MA, 01760, United States
Jayant Kumar
Affiliation:
[email protected], University of Massachusetts Lowell, Center for Advanced Materials, Lowell, MA, 01854, United States
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Abstract

Nano- and micro-structured SnO2 has been widely utilized as gas sensors. These SnO2 based gas sensors are often made by chemical etching, vapor deposition or lithography. Here we report a facile and vacuum-free technique to fabricate large area one-dimensional periodic SnO2 nano arrays using surface relief grating created on azobenzene functionalized polymer thin films as template. Atomic force microscopy, scanning electron microscopy and energy dispersive X-ray spectroscopy characterizations confirmed the successful fabrication of SnO2 nano arrays. The fabricated SnO2 structure exhibited the same periodicity as the template with a width of a few hundred nanometers.

Keywords

nanostructureSnsemiconducting
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1059: Symposium KK – Nanoscale Pattern Formation , 2007 , 1059-KK10-27
Copyright
Copyright © Materials Research Society 2008

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References

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