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Fabrication of Nanostructured Thin Films Using Porous Alumina Templates

Published online by Cambridge University Press:  01 February 2011

Aijun Yin ,
Jin Ho Kim  and
Jimmy Xu
Aijun Yin
Affiliation:
[email protected], Brown University, Division of ENgineering, 182 Hope Street, Box D, Providence, RI, 02912, United States, 401-863-2447, 401-863-9028
Jin Ho Kim
Affiliation:
[email protected], Brown University, Engineering, 184 Hope Street, Box D, Providence, RI, 02912, United States
Jimmy Xu
Affiliation:
[email protected], Brown University, Engineering, 184 Hope Street, Box D, Providence, RI, 02912, United States
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Abstract

We demonstrate a method for fabricating a variety of nanostructured metallic thin films by using one simple approach based on the use of anodic aluminum oxide (AAO) membrane as masking template. Highly-ordered large-area metallic nanopore- or nanotip-arrays (e.g., Ni, Ag, Au), with various sizes and shapes, were deposited onto AAO membranes through e-beam evaporation. Free standing nano-patterned metallic films were obtained after chemically removing the template and characterized using scanning electron microscopy and electrochemical methods. The nanostructured films will find use in a number of applications, such as plasmonics, electrochemical and biomedical analysis, and catalysis.

Keywords

thin filmnanostructureion-beam assisted deposition
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 951: Symposium E – Nanofunctional Materials, Nanostructures and Novel Devices for Biological and Chemical Detection , 2006 , 0951-E09-15
Copyright
Copyright © Materials Research Society 2007

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References

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