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Fabrication of Microstructures for Microphotonic Circuit

Published online by Cambridge University Press:  21 March 2011

Subhasish Chakraborty ,
D G Hasko  and
R J Mears
Subhasish Chakraborty
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
D G Hasko
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
R J Mears
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
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Abstract

We describe fabrication of sub-micron photonic bandgap structures on Si/SiO2 optical waveguide, which could be used at λ=1.54μm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 692: Symposium H – Progress in Semiconductor Materials for Optoelectronic Applications , 2001 , K8.4.1
Copyright
Copyright © Materials Research Society 2002

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