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Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties

Published online by Cambridge University Press:  17 March 2011

A. V. Sumant ,
O. Auciello ,
A. R. Krauss ,
D. M. Gruen ,
D. Ersoy ,
J. Tucek ,
A. Jayatissa ,
E. Stach ,
N. Moldovan  and
D. Mancini
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A. V. Sumant
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
O. Auciello
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
A. R. Krauss
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
D. M. Gruen
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
D. Ersoy
Affiliation:
University of Illinois-Chicago, IL.
J. Tucek
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
A. Jayatissa
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL.
E. Stach
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, Berkeley, CA.
N. Moldovan
Affiliation:
Experimental Facility Division, Argonne National Laboratory, Argonne, IL.
D. Mancini
Affiliation:
Experimental Facility Division, Argonne National Laboratory, Argonne, IL.
H. G. Busmann
Affiliation:
Fraunhofer Institute for Applied Materials Science, Bremen, Germany
E. M. Meyer
Affiliation:
Institute for Microsensors, Actuators, and Systems, University of Bremen, Germany
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Abstract

The mechanical, thermal, chemical, and tribological properties of diamond make it an ideal material for the fabrication of MEMS components. However, conventional CVD diamond deposition methods result in either a coarse-grained pure diamond structure that prevents high- resolution patterning, or in a fine-grained diamond film with a significant amount of intergranular non-diamond carbon. At Argonne National Laboratory, we are able to produce phase-pure ultrananocrystalline diamond (UNCD) films for the fabrication of MEMS components. UNCD is grown by microwave plasma CVD using C60-Ar or CH4-Ar plasmas, resulting in films that have 3-5 nm grain size, are 10-20 times smoother than conventionally grown diamond films, and can have mechanical properties similar to that of single crystal diamond. We used lithographic patterning, lift-off, and etching, in conjunction with the capability for growing UNCD on SiO2 to fabricate 2-D and 3-D UNCD-MEMS structures. We have performed initial characterization of mechanical properties by using nanoindentation and in-situ TEM indentor techniques. The values of Hardness (∼88 GPa) and Young's modulus (∼ 864 GPa) measured are very close to those of single crystal diamond (100 GPa and 1000 GPa respectively). The results show that UNCD is a promising material for future high performance MEMS devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE5.33
Copyright
Copyright © Materials Research Society 2001

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