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Fabrication of Er3+/Pr3+ Co-doped Soda-lime Glass Thin Films Using RF Magnetron Sputtering Method and Optical Property Characterization

Published online by Cambridge University Press:  01 February 2011

Sang-Hoon Shin ,
Sung-Dae Kim ,
Jong-Ha Moon  and
Jin Hyeok Kim
Sang-Hoon Shin
Affiliation:
Department of Materials Science and Engineering, Chonnam National University 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, South Korea
Sung-Dae Kim
Affiliation:
Department of Materials Science and Engineering, Chonnam National University 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, South Korea
Jong-Ha Moon
Affiliation:
Department of Materials Science and Engineering, Chonnam National University 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, South Korea
Jin Hyeok Kim
Affiliation:
Department of Materials Science and Engineering, Chonnam National University 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, South Korea
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Abstract

Er3+/Pr3+ co-doped soda-lime glass thin films have been fabricated using RF magnetron sputtering method and their structural and optical properties have been studied. Deposition rate, crystallinity, and composition of glass thin films were investigated by scanning electron microscopy, transmission electron microscopy, and electron probe micro area analysis. Refractive index, birefringence and binding characteristics have been investigated using a prism coupler and x-ray photoelectron spectroscopy. Er3+/Pr3+ co-doped soda lime glass thin films were prepared by changing substrate temperature (room temp.∼550 ), RF power (90W∼150W), and Ar/O2 gas flow ratio at processing pressure of 4mTorr. Glass thin films could be obtained at the optimized processing condition at 350, RF power (130W), and gas flow (Ar:O2=40:0) with maximum deposition rate of 1.6νm/h. Refractive index increased from 1.5614 to 1.5838 and birefringence increased from 0.000154 to 0.000552 as the content of Pr3+ increased. Binding energy of Pr3d increased as the content of Pr3+ increased.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 866 , 2005 , V5.5/FF5.5
Copyright
Copyright © Materials Research Society 2005

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